Overview of residual stress in MEMS structures: Its origin, measurement, and control
Micro-electro-mechanical system (MEMS) technology has radically changed the scale,
performance, and cost of a wide variety of sensors and actuators by taking advantage of …
performance, and cost of a wide variety of sensors and actuators by taking advantage of …
Design and fabrication of SOI technology based MEMS differential capacitive accelerometer structure
This paper discusses the design and fabrication of MEMS differential capacitive
accelerometer (z-axis sensitive) structure. The accelerometer structure consists of one each …
accelerometer (z-axis sensitive) structure. The accelerometer structure consists of one each …
Influence of residual stress on performance of AlN thin film based piezoelectric MEMS accelerometer structure
The presence of residual stress is inevitable and major constraint for MEMS devices as they
induce deformation, fracture, fatigue and micro structural changes in the structure. This …
induce deformation, fracture, fatigue and micro structural changes in the structure. This …
Influence of deep reactive ion etching process parameters on etch selectivity and anisotropy in stacked silicon substrates for fabrication of comb-type MEMS capacitive …
This paper presents etching optimization of comb structure formation in small silicon
substrates mounted on a large silicon wafer (150 mm diameter) using the S1818 photoresist …
substrates mounted on a large silicon wafer (150 mm diameter) using the S1818 photoresist …
Effect of vacuum packaging on bandwidth of push–pull type capacitive accelerometer structure
This paper presents the effect of vacuum packaging on the band-width of push–pull type
capacitive accelerometer structure. The accelerometer structure (for±30 g application) …
capacitive accelerometer structure. The accelerometer structure (for±30 g application) …
Characterization of SOI MEMS capacitive accelerometer under varying acceleration shock pulse durations
In this work, the response of the z-axis differential capacitive MEMS accelerometer structure
is studied under mechanical shock. The resonant frequency of the accelerometer is 9.12 …
is studied under mechanical shock. The resonant frequency of the accelerometer is 9.12 …
Evaluation of residual stress of c oriented AlN/Si (111) and its impact on mushroom-shaped piezoelectric resonator
Aluminium nitride-based MEMS resonators are one of the interesting recent research topics
for its tremendous potential in a wide variety of applications. This paper focuses on the …
for its tremendous potential in a wide variety of applications. This paper focuses on the …
Effect of Growth Induced Residual Stress in Epitaxial AlN thin film on SiC Substrate for MEMS Applications
Aluminum nitride (AlN) and silicon carbide (SiC) are the two most prominent materials to
extend the application potential of micro-electro-mechanical system (MEMS) based sensors …
extend the application potential of micro-electro-mechanical system (MEMS) based sensors …
Evolution of residual stress in benzocyclobutene films with temperature
Benzocyclobutene (BCB) is widely used for wafer level packaging of radio frequency micro-
electro-mechanical system (RF MEMS) devices. Although BCB is spin-coated at room …
electro-mechanical system (RF MEMS) devices. Although BCB is spin-coated at room …
Characterization of SOI technology based MEMS differential capacitive accelerometer and its estimation of resolution by near vertical tilt angle measurements
Y Parmar, N Gupta, V Gond, SS Lamba… - Microsystem …, 2020 - Springer
This paper discusses the evaluation and testing of MEMS capacitive accelerometer (z-axis
sensitive) fabricated using silicon-on-insulator (SOI) wafer. The accelerometer structure …
sensitive) fabricated using silicon-on-insulator (SOI) wafer. The accelerometer structure …