The classical molecular dynamics simulation of the glancing angle deposition of silicon
dioxide films with practically meaningful dimensions is performed. The formation of …

Dependence of stress values in silicon dioxide films on its thickness in the initial stage of film
growth was investigated using atomistic molecular dynamics simulation. It was shown that …

The high-energy glancing angle deposition of silicon dioxide films with alternation of
deposition angle is studied using classical atomistic simulation. Both slow and fast …

An atomistic simulation of silicon dioxide thin films deposited using oxide targets is
performed. The influence of the oxide target on the deposition process is taken into account …

In this article, a combined approach for studying the optical anisotropy of porous thin films
obtained by the glancing angle deposition is presented. This approach combines modeling …

The full-atomistic classical molecular dynamics simulation of the laser heating of silicon
dioxide thin films is performed. Both dense isotropic films and porous anisotropic films are …

Using the classical molecular dynamics method, the influence of absorption of laser
radiation on heat transfer and temperature distribution in silicon dioxide thin films is studied …