Piezoelectric materials have attracted considerable attention over the last two decades
because many technologies utilize their core properties of piezoelectric materials. Previous …

With the development of technology, systems gravitate towards increasing in their
complexity, miniaturization, and level of automation. Amongst these systems, ultrasonic …

Transit-time ultrasonic flowmeters (TTUFs) are among the most widely used devices for flow
measurements. However, traditional TTUFs are usually based on a bulk piezoelectric …

In this work, a single cell capable of monitoring fluid density, viscosity, sound velocity, and
compressibility with a compact and small design is presented. The fluid measurement …

In this work we present an array of piezoelectric micromachined ultrasound transducer
(PMUT's) based on AlScN piezoelectric layer, monolithically integrated on top of a 130 nm …

A comprehensive review of the application of different ceramics for MEMS devices is
presented. Main ceramics materials used for MEMS systems and devices including alumina …

We introduce a novel piezoelectric micromachined ultrasonic transducer (PMUT) with a
mass-loaded suspended (MLSP) design, fabricated using sacrificial technique to advance …

This paper presents a system utilizing scandium-doped aluminum nitride (ScAlN)
piezoelectric micromachined ultrasonic transducers (PMUTs) for simultaneous detection of …

Ultrasound is widely applied in diverse domains, such as medical imaging, non-destructive
evaluation, and acoustic communication. Piezoelectric micromachined ultrasonic …

Ultrasonic nondestructive testing (NDT) usually utilizes conventional bulk piezoelectric
transducers as transceivers. However, the complicated preparation and assembly process of …