Semiconductor manufacturing apparatus
N Tsuji - US Patent 9,963,782, 2018 - Google Patents
A semiconductor manufacturing apparatus includes a stage, and an exhaust duct having an
annular passage surrounding a processing space over the stage, an annular slit through …
annular passage surrounding a processing space over the stage, an annular slit through …
Pumping apparatus and method for substrate processing chambers
The present disclosure relates to pumping devices, components thereof, and methods
associated therewith for substrate processing chambers. In one example, a pumping ring for …
associated therewith for substrate processing chambers. In one example, a pumping ring for …
Dimmable lamp tube
F Lu, R Liu, CM Liu - US Patent 11,530,784, 2022 - Google Patents
US11530784B1 - Dimmable lamp tube - Google Patents US11530784B1 - Dimmable lamp tube
- Google Patents Dimmable lamp tube Download PDF Info Publication number US11530784B1 …
- Google Patents Dimmable lamp tube Download PDF Info Publication number US11530784B1 …
Process kit for improving edge film thickness uniformity on a substrate
M Mustafa, MM Rasheed - US Patent 11,236,424, 2022 - Google Patents
Embodiments of process kits for us in a substrate processing chamber are provided herein.
In some embodiments, a process kit for use in a substrate processing chamber includes an …
In some embodiments, a process kit for use in a substrate processing chamber includes an …
Substrate processing apparatus
W Adachi, K Sato - US Patent 10,950,449, 2021 - Google Patents
Examples of a substrate processing apparatus includes a chamber, a susceptor provided in
the chamber, a flow control ring of an insulator that is mounted on the chamber and …
the chamber, a flow control ring of an insulator that is mounted on the chamber and …