Piezo-actuated stages have become more and more promising in nanopositioning
applications due to the excellent advantages of the fast response time, large mechanical …

This paper presents a brief history of scanning probe microscopes (SPMs) and a general
insight into an atomic force microscope (AFM), including its operating principles, modes …

Optical fiber distributed acoustic sensing (DAS) based on phase sensitive optical time
domain reflectometry (φ-OTDR) has a great demand in many application fields with large …

High-precision control of the piezoelectric nanopositioning stages is becoming a key
technique in some precision manufacturing equipment. However, the piezoelectric …

Piezoelectric micro-positioning (PMP) platform has been widely used in the field of high
precision tracking and positioning in recent years. However, the PMP platform has inherent …

In this paper, a modified repetitive control (MRC) based approach is developed for high-
speed tracking of nanopositioning stages. First, the hysteresis nonlinearity is decomposed …

Precise actuation is a widely utilized technology in the realm of high-end equipment.
Piezoelectric actuators (PEAs) stand out due to their exceptional attributes, including high …

In this article, the ultrahigh-precision planar motion control problem is investigated for a
novel long-stroke multileaf spring based microstage, by considering the cross-axial coupling …

Nanotechnology is the branch of science which deals with the manipulation of matters at an
extremely high resolution down to the atomic level. In recent years, atomic force microscopy …

In most nanotechnology applications, speed and precision are important requirements for
obtaining good topographical maps of material surfaces using atomic force microscopes …