There is an indispensable need for fluid flow rate and direction sensors in various medical,
industrial and environmental applications. Besides the critical demands on sensing range of …

This paper reviews three relatively modern categories of skin-friction measurement
techniques that are broadly classified as microelectromechanical systems (MEMS)-based …

This book on mechanical microsensors is based on a course organized by the Swiss
Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and …

Underwater flow sensing is important for many robotics and military applications, including
underwater robots and vessels. We report the development of micromachined, distributed …

Microhot-film shear-stress sensors have been developed by using surface micromachining
techniques. The sensor consists of a suspended silicon-nitride diaphragm located on top of …

Micro-electro-mechanical system (MEMS) devices integrate various mechanical elements,
sensors, actuators, and electronics on a single silicon substrate in order to accomplish a …

From a fluid dynamics perspective, the introduction of microelectromechanical systems
(MEMS) has considerably broadened the spectrum of workable experiments. A typical …

Manufacturing processes that can create extremely small machines have been developed in
recent years. Microelectromechanical systems (MEMS) refer to devices that have …

Application fields of micromachined devices are growing very rapidly due to the continuous
improvement of three dimensional technologies of micro-fabrication. In particular …

We discuss two types of micromachined flow sensors realized by using novel
microfabrication processes—a hot-wire anemometer (based on thermal transfer) and a …