Wet chemical cleaning of InP surfaces investigated by in situ and ex situ infrared spectroscopy

O Pluchery, YJ Chabal, RL Opila - Journal of applied physics, 2003 - pubs.aip.org
Wet chemical cleaning is central to semiconductor device processing. For InP-based
optoelectronic devices, controlling wet processing is challenging because of the high …

Low energy electron beam induced damage on gallium nitride based materials

H Nykänen, P Mattila, S Suihkonen… - … status solidi c, 2012 - Wiley Online Library
We present our studies on low energy electron beam induced damage to gallium nitride
semiconductor material. We have observed a clear reduction in InGaN single quantum well …

Study by EELS and EPES of the stability of InPO4/InP system

A Ouerdane, M Bouslama, M Ghaffour… - Applied surface …, 2008 - Elsevier
The goal of this research is to highlight the effectiveness of associating the spectroscopic
methods EELS and EPES in the study of thin film grown on substrates. We use the great …

AES, EELS and TRIM investigation of InSb and InP compounds subjected to Ar+ ions bombardment

A Abdellaoui, M Ghaffour, A Ouerdane, K Hamaida… - Applied surface …, 2008 - Elsevier
The interaction of ions with matter plays an important role in the treatment of material
surfaces. In this paper we study the effect of argon ion bombardment on the InSb surface in …

Investigation by EELS and TRIM simulation method of the interaction of Ar+ and N+ ions with the InP compound

N Berrouachedi, M Bouslama, A Abdellaoui… - Applied surface …, 2009 - Elsevier
In this study, the EELS results revealed the great sensitivity of InP compound submitted to
Ar+ or N+ ions at low energy. The preliminary treatment of InP by the Ar+ ions was useful as …

[PDF][PDF] Low energy electron beam irradiation of gallium nitride

H Nykänen - 2013 - aaltodoc.aalto.fi
In this work, the behavior of gallium nitride and indium gallium nitride under low energy
electron beam irradiation (LEEBI) has been investigated. Furthermore, a periodic silver …

Investigation by AES and EELS of ZnOInP (100) and SnO2Ag

M Bouslama, M Ghamnia, C Jardin, M Bouderbala… - Vacuum, 1996 - Elsevier
In this article, we study the thin films ZnO and SnO2 of 500 Å, grown by cathodic RF
sputtering on the substrates InP (100) and Ag, respectively, by using auger electron …

AES, EELS and TRIM simulation method study of InP (100) subjected to Ar+, He+ and H+ ions bombardment.

M Ghaffour, A Abdellaoui, M Bouslama… - EPJ Web of …, 2012 - epj-conferences.org
Auger Electron Spectroscopy (AES) and Electron Energy Loss Spectroscopy (EELS) have
been performed in order to investigate the InP (100) surface subjected to ions bombardment …

[PDF][PDF] Investigation by AES, EELS and TRIM Simulation Method of InP (100) Subjected to He and H Ions Bombardment

M Ghaffour, A Abdelkader, A Ouerdane… - Materials Sciences …, 2011 - researchgate.net
ABSTRACT Auger Electron Spectroscopy (AES) and Electron Energy Loss Spectroscopy
(EELS) have been performed in order to investigate the InP (100) surface subjected to ions …

Study by AES, EELS Spectroscopy of electron Irradiation on InP and InPO4/InP in comparison with Monte Carlo simulation

Z Lounis, M Bouslama, K Hamaida… - IOP Conference …, 2012 - iopscience.iop.org
We give the great interest to characterise the InP and InPO 4/InP submitted to electron beam
irradiation owing to the Auger Electron Spectroscopy (AES) associated to both methods …