Voltage‐and Metal‐assisted Chemical Etching of Micro and Nano Structures in Silicon: A Comprehensive Review

S Surdo, G Barillaro - Small, 2024 - Wiley Online Library
Sculpting silicon at the micro and nano scales has been game‐changing to mold bulk silicon
properties and expand, in turn, applications of silicon beyond electronics, namely, in …

[图书][B] Silicon wet bulk micromachining for MEMS

P Pal, K Sato - 2017 - taylorfrancis.com
Microelectromechanical systems (MEMS)-based sensors and actuators have become
remarkably popular in the past few decades. Rapid advances have taken place in terms of …

Biomaterial-based microfluidics for cell culture and analysis

R Ning, Q Zhuang, JM Lin - Cell Analysis on Microfluidics, 2018 - Springer
Microfluidic devices can integrate drug injection, bioreactors, sample separation and
detection on a individual platform with properties of fluidic incubation, programmable three …

Hierarchical silicon nanospikes membrane for rapid and high-throughput mechanical cell lysis

H So, K Lee, YH Seo, N Murthy… - ACS applied materials & …, 2014 - ACS Publications
This letter reports an efficient and compatible silicon membrane combining the physical
properties of nanospikes and microchannel arrays for mechanical cell lysis. This hierarchical …

On-chip drug screening technologies for nanopharmaceutical and nanomedicine applications

R Onbas, R Bilginer, A Arslan Yildiz - … : Principles and Applications Vol. 1, 2021 - Springer
Conventional drug discovery and screening processes have important drawbacks
particularly in preclinical phase which include in vitro drug screening test, namely, 2D cell …

Nanowire-integrated microporous silicon membrane for continuous fluid transport in micro cooling device

H So, JC Cheng, AP Pisano - Applied Physics Letters, 2013 - pubs.aip.org
We report an efficient passive micro pump system combining the physical properties of
nanowires and micropores. This nanowire-integrated microporous silicon membrane was …

[图书][B] The Fabrication of High-Aspect Ratio Gratings for Talbot Interferometer with Medical Imaging Application

V Singh - 2018 - search.proquest.com
X-ray Phase contrast-based Talbot interferometer creates high contrast between weak and
strong absorbing materials, which makes it effective in imaging soft tissues. However, its …

Thermal Ground Plane for Chip-Level Electronics Cooling

H So - 2014 - escholarship.org
The three-dimensional thermal ground plane was developed in response to the needs of
high-power density electronics applications in which heat must be removed as close to the …