Voltage‐and Metal‐assisted Chemical Etching of Micro and Nano Structures in Silicon: A Comprehensive Review
S Surdo, G Barillaro - Small, 2024 - Wiley Online Library
Sculpting silicon at the micro and nano scales has been game‐changing to mold bulk silicon
properties and expand, in turn, applications of silicon beyond electronics, namely, in …
properties and expand, in turn, applications of silicon beyond electronics, namely, in …
[图书][B] Silicon wet bulk micromachining for MEMS
P Pal, K Sato - 2017 - taylorfrancis.com
Microelectromechanical systems (MEMS)-based sensors and actuators have become
remarkably popular in the past few decades. Rapid advances have taken place in terms of …
remarkably popular in the past few decades. Rapid advances have taken place in terms of …
Biomaterial-based microfluidics for cell culture and analysis
R Ning, Q Zhuang, JM Lin - Cell Analysis on Microfluidics, 2018 - Springer
Microfluidic devices can integrate drug injection, bioreactors, sample separation and
detection on a individual platform with properties of fluidic incubation, programmable three …
detection on a individual platform with properties of fluidic incubation, programmable three …
Hierarchical silicon nanospikes membrane for rapid and high-throughput mechanical cell lysis
This letter reports an efficient and compatible silicon membrane combining the physical
properties of nanospikes and microchannel arrays for mechanical cell lysis. This hierarchical …
properties of nanospikes and microchannel arrays for mechanical cell lysis. This hierarchical …
On-chip drug screening technologies for nanopharmaceutical and nanomedicine applications
Conventional drug discovery and screening processes have important drawbacks
particularly in preclinical phase which include in vitro drug screening test, namely, 2D cell …
particularly in preclinical phase which include in vitro drug screening test, namely, 2D cell …
Nanowire-integrated microporous silicon membrane for continuous fluid transport in micro cooling device
H So, JC Cheng, AP Pisano - Applied Physics Letters, 2013 - pubs.aip.org
We report an efficient passive micro pump system combining the physical properties of
nanowires and micropores. This nanowire-integrated microporous silicon membrane was …
nanowires and micropores. This nanowire-integrated microporous silicon membrane was …
[图书][B] The Fabrication of High-Aspect Ratio Gratings for Talbot Interferometer with Medical Imaging Application
V Singh - 2018 - search.proquest.com
X-ray Phase contrast-based Talbot interferometer creates high contrast between weak and
strong absorbing materials, which makes it effective in imaging soft tissues. However, its …
strong absorbing materials, which makes it effective in imaging soft tissues. However, its …
Thermal Ground Plane for Chip-Level Electronics Cooling
H So - 2014 - escholarship.org
The three-dimensional thermal ground plane was developed in response to the needs of
high-power density electronics applications in which heat must be removed as close to the …
high-power density electronics applications in which heat must be removed as close to the …