In the past few years, rapid thermal processing (RTP) has gained acceptance as mainstream
technology for semiconductor manufacturing. This single wafer approach allows for faster …

In this paper, a PSO-based intelligent integration of design and control is proposed for one
kind of nonlinear curing process. This method combines the merits of both fuzzy …

The key issue in semiconductor rapid thermal processing (RTP), where silicon wafers are
heated to desired temperatures, is to ensure uniform wafer temperature profiles. This in turn …

Single wafer rapid thermal processing (RTP) has become one of the key technologies in
semiconductor manufacturing due to its faster wafer processing with reduced thermal budget …

This paper deals with the observer design for a nonlinear 1D heat equation based on a
single in-domain measurement motivated by rapid thermal silicon wafer production …

Nowadays, the electromagnetic ovens are used for heating the component assembly of
electronic manufacturing. The control systems of the electromagnetic ovens are feedback …

Single wafer rapid thermal processing (RTP) is widely used in semiconductor
manufacturing. A precisely applied thermal budget during RTP is crucial and relies on the …

Rapid thermal processing (RTP) units are used for various semiconductor fabrication steps
mainly due to the short processing time, which results in a low thermal budget and improved …

A variety of processes in the semiconductor industry require heating of the silicon wafer to
the desired temperature. This process is widely referred to as rapid thermal processing …

The design of a decentralized controller has been studied as an integral part of the
development of a commercial rapid thermal processing (RTP) system for manufacturing …