Ion implantation for deterministic single atom devices

JL Pacheco, M Singh, DL Perry, JR Wendt… - Review of Scientific …, 2017 - pubs.aip.org
We demonstrate a capability of deterministic doping at the single atom level using a
combination of direct write focused ion beam and solid-state ion detectors. The focused ion …

Single‐Ion Implantation for the Development of Si‐Based MOSFET Devices with Quantum Functionalities

JC McCallum, DN Jamieson, C Yang… - … in Materials Science …, 2012 - Wiley Online Library
Interest in single‐ion implantation is driven in part by research into development of solid‐
state devices that exhibit quantum behaviour in their electronic or optical characteristics …

Guided assembly of gold colloidal nanoparticles on silicon substrates prepatterned by charged particle beams

M Kolibal, M Konecny, F Ligmajer, D Skoda… - ACS …, 2012 - ACS Publications
Colloidal gold nanoparticles represent technological building blocks which are easy to
fabricate while keeping full control of their shape and dimensions. Here, we report on a …

Near-surface electrical characterization of silicon electronic devices using focused keV-range ions

SG Robson, P Räcke, AM Jakob, N Collins… - Physical Review …, 2022 - APS
The demonstration of universal quantum logic operations near the fault-tolerance threshold
has established ion-implanted near-surface donor atoms as a plausible platform for scalable …

Evaluation of the accuracy of stopping and range of ions in matter simulations through secondary ion mass spectrometry and Rutherford backscattering spectrometry …

M Titze, JL Pacheco, T Byers… - Journal of Vacuum …, 2021 - pubs.aip.org
The freely available “Stopping and Range of Ions in Matter”(SRIM) code is used for
evaluating ion beam ranges and depth profiles. We present secondary ion mass …

Single ion implantation for single donor devices using Geiger mode detectors

E Bielejec, JA Seamons, MS Carroll - Nanotechnology, 2010 - iopscience.iop.org
Electronic devices that are designed to use the properties of single atoms such as donors or
defects have become a reality with recent demonstrations of donor spectroscopy, single …

Precision pulse shape simulation for proton detection at the Nab experiment

L Hayen, JH Choi, D Combs, RJ Taylor, S Baeßler… - Physical Review C, 2023 - APS
The Nab experiment at Oak Ridge National Laboratory, USA, aims to measure the beta-
antineutrino angular correlation following neutron β decay to an anticipated precision of …

Transient processes induced by heavy projectiles in silicon

I Lazanu, S Lazanu - Nuclear Instruments and Methods in Physics …, 2010 - Elsevier
The thermal spike model developed for the electronic stopping power regime is extended to
consider both ionization and nuclear energy loss processes of the projectile as electronic …

Investigation of avalanche silicon detectors for low energy single ion implantation applications

C Yang, D Jamieson - Nuclear Instruments and Methods in Physics …, 2010 - Elsevier
Avalanche silicon photodiodes have potential applications to detect low energy single ions
for counting single ion impacts in shallow implant depths for the deterministic doping of …