Optical interferometry is a powerful tool for measuring and characterizing areal surface
topography in precision manufacturing. A variety of instruments based on optical …

Results of the application of wavelet transform for signal processing in white-light
interferometry are reported. The mother wavelet frequency is chosen to be the light-source …

This paper proposes a white-light phase-shifting method for interferometry, in which the
absolute phase of each point is measured individually. During the axial scanning of the …

A method for measuring birefringence by use of thermal-light polarization-sensitive optical
coherence tomography is presented. The use of thermal light brings to polarization-sensitive …

To deal with vibration disturbance in interferometric measurement of surface topography, we
present a simultaneous dual-wavelength phase-shifting interferometry (SDWPSI). SDWPSI …

Over the last 25 years driven by both the development of new technologies such as fast
computers and solid state devices and the necessity to precisely inspect these increasingly …

We present a new computational method of white light scanning interferometry for 3-D
surface mapping. This method accomplishes the task of detecting the true peak of the …

Several methods for the analysis of white light interferograms are presented and their
performance is compared to a new method employing the wavelet transform in connection …

White-light interferometry (WLI) is an established method for surface measurement. In WLI,
surface recovery algorithm from series of vertical scanning white light interferogram is pivotal …

We present a femtosecond laser-based interferometry for step-structure surface
measurement with a large field of view. A height axial scanning range of 348 µm is achieved …