Cluster tools are automated robotic manufacturing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …

We address a robotic flow shop scheduling problem where two part types are processed on
each given set of dedicated machines. A single robot moving on a fixed rail transports one …

In wafer fabrication, a robotic cluster tool is required to be closed down in order for
engineers to perform its on-demand and preventive maintenance and switch between …

Optimal cyclic scheduling problems of wafer-residency-time-constrained dual-arm cluster
tools in wafer fabrication are challenging and remain to be fully solved. Existing studies …

Accompanying the unceasing progress of integrated circuit manufacturing technology, the
mainstream production mode of current semiconductor wafer fabrication is featured with …

Due to the trends of larger wafer diameters and smaller lot sizes, cluster tools need to switch
from processing one lot of wafers to another frequently. This leads to more transient periods …

To satisfy the requirements of high-mix integrated-circuit chip production, multiple wafer
types are grouped into a lot to be fabricated concurrently in a multi-cluster tool system …

Robotized manufacturing systems consisting of several processing machines and a robot for
transporting jobs between the machines have been widely used in mechanical and …

With the reduction of wafer batch size on account of the diversification and individuation of
consumption demands, increasing importance has been attached to the schedulability and …

As wafer circuit widths shrink down, wafer fabrication processes require stringent quality
control. Therefore, fabs recently tend to clean a chamber after processing each wafer, in …