Design, modeling and control of high-bandwidth nano-positioning stages for ultra-precise measurement and manufacturing: a survey

WW Huang, X Wang, Y Meng, L Li… - … Journal of Extreme …, 2024 - iopscience.iop.org
High-bandwidth nano-positioning stages (NPSs) have boosted the advancement of modern
ultra-precise, ultra-fast measurement and manufacturing technologies owing to their fast …

Development of a novel flexure-based XY platform using single bending hybrid piezoelectric actuator

X Gao, Y Liu, S Zhang, J Deng… - IEEE/ASME Transactions …, 2022 - ieeexplore.ieee.org
In this article, a novel flexure-based XY platform using a bending hybrid piezoelectric
actuator was proposed, which was inspired by a classical piezoelectric stack-actuated …

A novel hollow-type XY piezoelectric positioning platform

L Yuan, L Wang, R Qi, Z Zhao, J Jin, C Zhao - International Journal of …, 2023 - Elsevier
To enhance space efficiency and reduce the planar dimensions of the piezoelectric platform,
propose an innovative three-stage flexible lever hollow XY piezoelectric platform powered …

High-speed atomic force microscopy in ultra-precision surface machining and measurement: challenges, solutions and opportunities

C Yang, CQ Dang, WL Zhu, BF Ju - Surface Science and Technology, 2023 - Springer
The atomic force microscope (AFM) possesses a unique capability for three-dimensional,
high-resolution imaging down to the atomic level. It operates without the needs of additional …

A negative imaginary approach to hybrid integrator-gain system control

K Shi, N Nikooienejad, IR Petersen… - 2022 IEEE 61st …, 2022 - ieeexplore.ieee.org
In this paper, we show that a hybrid integrator-gain system (HIGS) is a nonlinear negative
imaginary (NNI) system. We prove that the positive feedback interconnection of a linear …

Negative imaginary control using hybrid integrator-gain systems: Application to MEMS nanopositioner

K Shi, N Nikooienejad, IR Petersen… - … on Control Systems …, 2023 - ieeexplore.ieee.org
In this article, we propose a new approach to address the control problem for negative
imaginary (NI) systems by using hybrid integrator-gain systems (HIGSs). We investigate the …

Dual-notch-based repetitive control for tracking Lissajous scan trajectories with piezo-actuated nanoscanners

L Li, WW Huang, X Wang… - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
Using Lissajous scan trajectory is a promising way to get rid of issues resulting from the
raster scan trajectory in several advanced applications, like atomic force microscopy and fast …

Iterative learning sliding mode control for UAV trajectory tracking

LV Nguyen, MD Phung, QP Ha - Electronics, 2021 - mdpi.com
This paper presents a novel iterative learning sliding mode controller (ILSMC) that can be
applied to the trajectory tracking of quadrotor unmanned aerial vehicles (UAVs) subject to …

Periodic-disturbance observer using spectrum-selection filtering scheme for cross-coupling suppression in atomic force microscopy

L Li, WW Huang, X Wang, YL Chen… - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
Repetitive disturbances exist widely within the automation systems, which is one of the
major issues that hinder the achievement of precision operations. Dedicated to mitigating …

Cascaded iterative learning motion control of precision maglev planar motor with experimental investigation

H Fu, C Hu, D Yu, Y Zhu, M Zhang - ISA transactions, 2023 - Elsevier
Cascaded iterative learning control (CILC) is explored for a magnetically levitated (maglev)
planar motor to achieve excellent tracking motion performance in this paper. The CILC …