Design, modeling and control of high-bandwidth nano-positioning stages for ultra-precise measurement and manufacturing: a survey
High-bandwidth nano-positioning stages (NPSs) have boosted the advancement of modern
ultra-precise, ultra-fast measurement and manufacturing technologies owing to their fast …
ultra-precise, ultra-fast measurement and manufacturing technologies owing to their fast …
Development of a novel flexure-based XY platform using single bending hybrid piezoelectric actuator
In this article, a novel flexure-based XY platform using a bending hybrid piezoelectric
actuator was proposed, which was inspired by a classical piezoelectric stack-actuated …
actuator was proposed, which was inspired by a classical piezoelectric stack-actuated …
A novel hollow-type XY piezoelectric positioning platform
To enhance space efficiency and reduce the planar dimensions of the piezoelectric platform,
propose an innovative three-stage flexible lever hollow XY piezoelectric platform powered …
propose an innovative three-stage flexible lever hollow XY piezoelectric platform powered …
High-speed atomic force microscopy in ultra-precision surface machining and measurement: challenges, solutions and opportunities
The atomic force microscope (AFM) possesses a unique capability for three-dimensional,
high-resolution imaging down to the atomic level. It operates without the needs of additional …
high-resolution imaging down to the atomic level. It operates without the needs of additional …
A negative imaginary approach to hybrid integrator-gain system control
K Shi, N Nikooienejad, IR Petersen… - 2022 IEEE 61st …, 2022 - ieeexplore.ieee.org
In this paper, we show that a hybrid integrator-gain system (HIGS) is a nonlinear negative
imaginary (NNI) system. We prove that the positive feedback interconnection of a linear …
imaginary (NNI) system. We prove that the positive feedback interconnection of a linear …
Negative imaginary control using hybrid integrator-gain systems: Application to MEMS nanopositioner
K Shi, N Nikooienejad, IR Petersen… - … on Control Systems …, 2023 - ieeexplore.ieee.org
In this article, we propose a new approach to address the control problem for negative
imaginary (NI) systems by using hybrid integrator-gain systems (HIGSs). We investigate the …
imaginary (NI) systems by using hybrid integrator-gain systems (HIGSs). We investigate the …
Dual-notch-based repetitive control for tracking Lissajous scan trajectories with piezo-actuated nanoscanners
Using Lissajous scan trajectory is a promising way to get rid of issues resulting from the
raster scan trajectory in several advanced applications, like atomic force microscopy and fast …
raster scan trajectory in several advanced applications, like atomic force microscopy and fast …
Iterative learning sliding mode control for UAV trajectory tracking
This paper presents a novel iterative learning sliding mode controller (ILSMC) that can be
applied to the trajectory tracking of quadrotor unmanned aerial vehicles (UAVs) subject to …
applied to the trajectory tracking of quadrotor unmanned aerial vehicles (UAVs) subject to …
Periodic-disturbance observer using spectrum-selection filtering scheme for cross-coupling suppression in atomic force microscopy
Repetitive disturbances exist widely within the automation systems, which is one of the
major issues that hinder the achievement of precision operations. Dedicated to mitigating …
major issues that hinder the achievement of precision operations. Dedicated to mitigating …
Cascaded iterative learning motion control of precision maglev planar motor with experimental investigation
H Fu, C Hu, D Yu, Y Zhu, M Zhang - ISA transactions, 2023 - Elsevier
Cascaded iterative learning control (CILC) is explored for a magnetically levitated (maglev)
planar motor to achieve excellent tracking motion performance in this paper. The CILC …
planar motor to achieve excellent tracking motion performance in this paper. The CILC …