Energy-enhanced atomic layer deposition for more process and precursor versatility

SE Potts, WMM Kessels - Coordination Chemistry Reviews, 2013 - Elsevier
Atomic layer deposition (ALD) is a popular deposition technique comprising two or more
sequential, self-limiting surface reactions, which make up an ALD cycle. Energy-enhanced …

Mechanisms of surface reactions in thin solid film chemical deposition processes

F Zaera - Coordination Chemistry Reviews, 2013 - Elsevier
In this review, key aspects of the surface chemistry associated with atomic layer deposition
(ALD) are discussed. It is argued that, in spite of its central role in defining the efficacy of …

[HTML][HTML] Trilayer tunnel selectors for memristor memory cells

BJ Choi, J Zhang, K Norris, G Gibson… - … (Deerfield Beach, Fla …, 2016 - ncbi.nlm.nih.gov
An integrated memory cell with a memristor and a trilayer crested barrier selector, showing
repeatable nonlinear current–voltage switching loops is presented. The fully atomic‐layer …

Effect of Film Morphology and Thickness on Charge Transport in Ta3N5/Ta Photoanodes for Solar Water Splitting

BA Pinaud, PCK Vesborg… - The Journal of Physical …, 2012 - ACS Publications
Photoelectrochemical water splitting is one of many approaches being studied to harvest
sunlight and produce renewable H2. Tantalum nitride (Ta3N5) is a promising photoanode …

Direct Deposition of Crystalline Ta3N5 Thin Films on FTO for PEC Water Splitting

H Hajibabaei, DJ Little, A Pandey, D Wang… - … applied materials & …, 2019 - ACS Publications
Tantalum nitride is a promising photoanode material for solar water splitting, but further
study and practical use are constrained by the harsh conditions of the synthesis from Ta …

[HTML][HTML] Tantalum (oxy) nitride: narrow bandgap photocatalysts for solar hydrogen generation

M Xiao, S Wang, S Thaweesak, B Luo, L Wang - Engineering, 2017 - Elsevier
Photocatalytic water splitting, which directly converts solar energy into hydrogen, is one of
the most desirable solar-energy-conversion approaches. The ultimate target of …

Tantalum nitride films integrated with transparent conductive oxide substrates via atomic layer deposition for photoelectrochemical water splitting

H Hajibabaei, O Zandi, TW Hamann - Chemical Science, 2016 - pubs.rsc.org
Tantalum nitride, Ta3N5, is one of the most promising materials for solar energy driven water
oxidation. One significant challenge of this material is the high temperature and long …

Controlling the Structural and Optical Properties of Ta3N5 Films through Nitridation Temperature and the Nature of the Ta Metal

BA Pinaud, A Vailionis, TF Jaramillo - Chemistry of materials, 2014 - ACS Publications
The development of a reliable synthetic route to produce high performance Ta3N5
photoanodes has been complicated by the large number of synthetic parameters, notably …

Mechanical and metallic properties of tantalum nitrides from first-principles calculations

D Li, F Tian, D Duan, K Bao, B Chu, X Sha, B Liu… - RSC advances, 2014 - pubs.rsc.org
The phase stability, mechanical properties and metallic properties of tantalum nitrides are
extensively studied by means of first principles calculations. The relationship between …

Study on the Electrical, Structural, Chemical and Optical Properties of PVD Ta(N) Films Deposited with Different N2 Flow Rates

Y Hu, M Rasadujjaman, Y Wang, J Zhang, J Yan… - Coatings, 2021 - mdpi.com
By reactive DC magnetron sputtering from a pure Ta target onto silicon substrates, Ta (N)
films were prepared with different N2 flow rates of 0, 12, 17, 25, 38, and 58 sccm. The effects …