This paper provides a comprehensive review on the design and development of micro
displacement amplification mechanisms. Micro displacement amplification mechanisms are …

This paper presents a review of the current applications of Micro-Electro-Mechanical
Systems (MEMS) in the robotics and industrial applications. MEMS are widely used as …

This paper presents fabrication, characterization, and modeling of micro/
nanoelectromechanical high-frequency resonators actuated using thermal forces with …

A mechanically coupled array technique to enable a fully differential operation of single-
crystal silicon thermal-piezoresistive resonators (TPRs) has been demonstrated to alleviate …

This paper describes a phenomenon that limits the power handling of MEMS resonators. It is
observed that above a certain driving level, the resonance amplitude becomes independent …

This study demonstrates amplification of electrical signals using a very simple
nanomechanical device. It is shown that vibration amplitude amplification using a …

Amplifying the signal-to-noise ratio of resonant sensors is vital toward the effort to
miniaturize devices into the sub-micro and nano regimes. In this paper, we demonstrate …

We present an H-shaped resonator made of two clamped-clamped microbeams
mechanically coupled at the middle with a strong coupler to achieve, in a single device …

Abstract Design and analysis of microelectromechanical system based displacement
amplification mechanism (MDAM) using analytical and finite element method is presented in …

This paper presents a hybrid resonator architecture called the vibrating body field-effect
transistor (VB-FET), which combines a silicon microelectromechanical (MEM) resonator and …