Manufacturing of semiconductor chips involves hundreds of process steps. For high-
throughput semiconductor manufacturers, it is not feasible to get all the quality …

Virtual metrology (VM) is the estimation of metrology variables that may be expensive or
difficult to measure using readily available process information. This paper investigates the …

Semiconductor wafer etching is, to a large extent, an open-loop process with little direct
feedback control. Most silicon chip manufacturers rely on the rigorous adherence to a …

Plasma processes can present dicult control challenges due to time-varying dynamics and a
lack of relevant and/or regular measurements. Virtual metrology (VM) is the use of …

Plasma etch is a complex semiconductor manufacturing process in which material is
removed from the surface of a silicon wafer using a gas in plasma form. As the process etch …

Virtual metrology is the prediction of metrology variables using easily accessible process
variables and mathematical models. Because metrology variables in semiconductor …

In semiconductor manufacturing processes, there are certain quality measurements cannot
be easily obtained at a low cost. In such cases, virtual metrology (VM) is typically used to …

Manufacturing of integrated circuits involves many sequential processes executed to
nanoscale tolerances, and the yield depends on the often-unmeasured quality of …

Manufacturing of integrated circuits involves many sequential processes, often ex-ecuted to
nanoscale tolerances, and the yield depends on the often unmeasured quality of …