This letter reports an aluminium nitride (AlN) based micromechanical resonator with high-
effective coupling coefficient (k 2 eff) and low insertion loss (IL), which are comparable with …

This work reports on the measured performance of an Aluminum Scandium Nitride (AlScN)
Two-Dimensional Resonant Rods resonator (2DRR), fabricated by using a Sc-doping …

This paper reports, for the first time, on waveguide-based resonators implemented in
scandium-doped aluminum nitride-on-silicon (ScAlN-on-Si) stack to simultaneously benefit …

Abnormally oriented grains (AOGs) widely exist in the Sc doped AlN films, especially for Sc
concentration more than 15%. In this work, the impact of the AOGs on the performance of …

This paper presents a modified Lamé-mode resonator (MLMR) with a high, effective
electromechanical coupling coefficient (K eff 2)⁠. With trapezoidal grooves introduced by …

This work presents the implementation of two 4 th order ladder type integrated filters
consisting of modified laterally coupled alternating thickness (LCAT) mode resonators …

Scandium aluminum nitride (ScAlN) films are commercially used for RF filter application
owing to their large thickness extensional mode electromechanical coupling coefficient …

We present a new design for AlScN contour-mode-resonators (CMRs) operating in the
radiofrequency (RF) range. This design relies on acoustic metamaterials (AM) based lateral …

The increasing demand for high performance and miniature high frequency electronics has
motivated the development of Micro-electro Mechanical Systems (MEMS) resonators, some …

A thickness and lateral mode coupled film acoustic resonator (CBAR) with k_eff^2
comparable to the FBAR has been proposed and demonstrated previously. This paper …