Semiconductor manufacturing capital equipment necessitates continuous enhancement in
performance and overall efficiency to meet industry demands. Additive Manufacturing (AM) …

High-bandwidth nano-positioning stages (NPSs) have boosted the advancement of modern
ultra-precise, ultra-fast measurement and manufacturing technologies owing to their fast …

Aiming at the realization of high precision angle adjusting, this article proposed a rotary
platform based on stick-slip principle, which adopted a dual-driven working mode to realize …

This paper presents two generalized models that can quickly formulate the closed-form
equations of compliance and precision for multiple-axis flexure hinges including symmetric …

It is an open challenge to synthesize XYθ compliant parallel mechanisms (CPMs) with
decoupled motion and actuation characteristics for increasing applications from …

To achieve a wide operating velocity range, stepping without backward motion, and high
positioning resolution, a walking-type piezoelectric actuator with compliant mechanisms is …

Compliant mechanisms (CMs) exhibit some excellent mechanical properties and provide
numerous innovative solutions for many existing mechanical applications. Among them …

Mechanically amplified piezoelectric actuators (APAs) can be found in many scenarios of
precision engineering and instrumental devices. However, the electro-mechanical design of …

In order to realize the rapid analysis and optimization of the flexible support structure, the
parametric design method is used to establish the three-dimensional model. Basic …

This paper presents two novel large-stroke XY micropositioning stages that are fabricated
completely using four-dimensional (4D) printed polylactic acid (PLA). The proposed designs …