GaN-based power high-electron-mobility transistors on Si substrates: from materials to devices

N Wu, Z Xing, S Li, L Luo, F Zeng… - … Science and Technology, 2023 - iopscience.iop.org
Conventional silicon (Si)-based power devices face physical limitations—such as switching
speed and energy efficiency—which can make it difficult to meet the increasing demand for …

[HTML][HTML] Multi-channel nanowire devices for efficient power conversion

L Nela, J Ma, C Erine, P Xiang, TH Shen, V Tileli… - Nature …, 2021 - nature.com
Nanowire-based devices can potentially be of use in a variety of electronic applications,
from ultrascaled digital circuits to 5G communication networks. However, the devices are …

Progress of GaN-based E-mode HEMTs

H Huang, Y Lei, N Sun - Journal of Physics D: Applied Physics, 2024 - iopscience.iop.org
With the continuous improvement of the power density and operating frequency in power
conversion systems, it is necessary to develop the new power electronic products with better …

Breakdown enhancement and current collapse suppression by high-resistivity GaN cap layer in normally-off AlGaN/GaN HEMTs

R Hao, W Li, K Fu, G Yu, L Song, J Yuan… - IEEE Electron …, 2017 - ieeexplore.ieee.org
In this letter, a device structure of high-resistivity-cap-layer HEMT (HRCL-HEMT) is
developed for normally-off p-GaN gate HEMT toward high breakdown voltage and low …

Investigation of In Situ SiN as Gate Dielectric and Surface Passivation for GaN MISHEMTs

H Jiang, C Liu, Y Chen, X Lu… - IEEE Transactions on …, 2017 - ieeexplore.ieee.org
In this paper, we present a systematic investigation of metal–organic chemical vapor
deposition-grown in situ SiN as the gate dielectric and surface passivation for AlGaN/GaN …

AlGaN/GaN MIS-HEMT with PECVD SiNx, SiON, SiO2 as Gate Dielectric and Passivation Layer

K Geng, D Chen, Q Zhou, H Wang - Electronics, 2018 - mdpi.com
Three different insulator layers SiNx, SiON, and SiO2 were used as a gate dielectric and
passivation layer in AlGaN/GaN metal–insulator–semiconductor high-electron-mobility …

Study of Interface Traps in AlGaN/GaN MISHEMTs Using LPCVD SiNx as Gate Dielectric

X Lu, K Yu, H Jiang, A Zhang… - IEEE Transactions on …, 2017 - ieeexplore.ieee.org
Interface trapping is one of the most notorious effects that limit device performance in GaN-
based MIS high electron mobility transistors (MISHEMTs). In this paper, we present a …

AlGaN/GaN MIS-HEMTs of Very-Low Hysteresis and Current Collapse With In-Situ Pre-Deposition Plasma Nitridation and LPCVD-Si3N4 Gate Insulator

Z Zhang, W Li, K Fu, G Yu, X Zhang… - IEEE Electron …, 2016 - ieeexplore.ieee.org
In this letter, we report an in-situ predeposition plasma nitridation process, which is adopted
to remove the GaN surface oxygen-related bonds and reduce surface dangling bonds by …

Low ON-Resistance GaN Schottky Barrier Diode With High Uniformity Using LPCVD Si3N4 Compatible Self-Terminated, Low Damage Anode Recess …

J Gao, Y Jin, B Xie, CP Wen, Y Hao… - IEEE Electron …, 2018 - ieeexplore.ieee.org
In this letter, we demonstrate a recessed-anode Schottky barrier diode (SBD) on a double
AlGaN/GaN heterojunction structure. A self-terminated, oxidation/wet etching with low …

Improving Performances of Enhancement-Mode AlGaN/GaN MIS-HEMTs on 6-inch Si Substrate Utilizing SiON/Al2O3 Stack Dielectrics

Z Sun, H Huang, R Wang, N Sun, P Tao… - IEEE Electron …, 2019 - ieeexplore.ieee.org
Enhancement-mode (E-mode) GaN-based MIS-HEMTs still suffer from undeniable gate
leakage or low gate breakdown voltage due to the low quality of gate dielectrics, resulting in …