Phase and fringe order determination in wavelength scanning interferometry
A method to obtain unambiguous surface height measurements using wavelength scanning
interferometry with an improved repeatability, comparable to that obtainable using phase …
interferometry with an improved repeatability, comparable to that obtainable using phase …
Improvement of the fringe analysis algorithm for wavelength scanning interferometry based on filter parameter optimization
The phase slope method which estimates height through fringe pattern frequency and the
algorithm which estimates height through the fringe phase are the fringe analysis algorithms …
algorithm which estimates height through the fringe phase are the fringe analysis algorithms …
Quadrature wavelength scanning interferometry
A novel method to double the measurement range of wavelength scanning interferometery
(WSI) is described. In WSI the measured optical path difference (OPD) is affected by a sign …
(WSI) is described. In WSI the measured optical path difference (OPD) is affected by a sign …
Development and calibration of wavelength scanning interferometry for surface topography measurement
G Moschetti - 2016 - eprints.hud.ac.uk
Modern advanced manufacturing is capable of generating complex structures on large area
substrates while maintaining high feature resolution and small defects. Examples of these …
substrates while maintaining high feature resolution and small defects. Examples of these …
A new method of wavelength scanning interferometry for inspecting surfaces with multi-side high-sloped facets
T Zhang - 2018 - eprints.hud.ac.uk
With the development of modern advanced manufacturing technologies, the requirements
for ultra-precision structured surfaces are increasing rapidly for both high value-added …
for ultra-precision structured surfaces are increasing rapidly for both high value-added …