Scatterometry is a fast, precise and low cost way to determine the mean pitch and
dimensional parameters of periodic structures with lateral resolution of a few nanometer. It is …

Conspectus Electrocatalysts play an important role in catalyzing the kinetics for oxygen
reduction and oxygen evolution reactions for many air-based energy storage and …

Downscaling, miniaturization and 3D staking of the micro/nano devices are burgeoning
phenomena in the semiconductor industry which have posed sophisticated challenges in …

Control of surface topography has always been of vital importance for manufacturing and
many other engineering and scientific disciplines. However, despite over one hundred years …

Accurate and traceable measurements of critical dimension (CD) and sidewall profile of
extreme ultraviolet (EUV) photomask structures using atomic force microscopes (AFMs) are …

This study investigates the effect of surface roughness on the diffraction efficiency of two-
dimensional gratings. Firstly, a roughness model was constructed using FDTD, followed by a …

Periodic nanostructures are fundamental elements in optical instrumentation as well as
basis structures in integrated electronic circuits. Decreasing sizes and increasing complexity …

Grazing-incidence small-angle X-ray scattering (GISAXS) is increasingly used for the
metrology of substrate-supported nanoscale features and nanostructured films. In the case …

Manufacturing-induced sidewall roughness has a significant impact on the diffraction
efficiency of extreme ultraviolet (EUV) gratings and masks, which could be evaluated by a …

Supplement one of the'Guide to the Expression of Uncertainties in Measurements
(GUM)'recommends to estimate measurement uncertainties by Monte Carlo calculations. For …