Longitudinal magneto-optical Kerr effect in subwavelength thick ferromagnetic films investigated by Mueller matrix ellipsometry

J Liu, W Gong, L Li, S Zhang, J Zhu, R Chen… - Optics and Lasers in …, 2023 - Elsevier
Accurately characterizing the magneto-optical (MO) Kerr and optical responses of
subwavelength thick ferromagnetic films is of great significance in the field of MO devices. In …

Incoherent partial superposition modeling for single-shot angle-resolved ellipsometry measurement of thin films on transparent substrates

L Peng, J Wang, F Gao, J Zhang, W Zhai, L Zhou… - Optics …, 2024 - opg.optica.org
Ellipsometric measurement of transparent samples suffers from substrate backside reflection
challenges, including incoherent and partial superposition issues. The recently developed …

Thin film characterization by learning-assisted multi-angle polarized microscopy

Z Cao, Y Chen, F Xian, H Ren, B Tu - Optics Letters, 2024 - opg.optica.org
Thin film characterization is a necessary step in the semiconductor industry and nanodevice
fabrication. In this work, we report a learning-assisted method to conduct the measurement …

基于矢量光束偏振特性的薄膜参数表征

李金花, 曹兆楼, 郑改革 - Acta Optica Sinica, 2024 - opticsjournal.net
摘要传统椭偏仪表征薄膜参数时存在光斑尺寸较大, 空间分辨率较低且基底透明时易受背面反射
光干扰等问题. 针对这些问题, 提出采用高数值孔径显微物镜聚焦线偏振光的方法 …