Micromachined resonators: A review

R Abdolvand, B Bahreyni, JEY Lee, F Nabki - Micromachines, 2016 - mdpi.com
This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

A review of MEMS oscillators for frequency reference and timing applications

JTM Van Beek, R Puers - Journal of Micromechanics and …, 2011 - iopscience.iop.org
MEMS-based oscillators are an emerging class of highly miniaturized, batch manufacturable
timing devices that can rival the electrical performance of well-established quartz-based …

MEMS resonators for frequency reference and timing applications

G Wu, J Xu, EJ Ng, W Chen - Journal of …, 2020 - ieeexplore.ieee.org
An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

A CMOS Temperature Sensor With a Voltage-Calibrated Inaccuracy of 0.15C (3) From 55C to 125C

K Souri, Y Chae, KAA Makinwa - IEEE journal of solid-state …, 2012 - ieeexplore.ieee.org
This paper describes the design of a low power, energy-efficient CMOS smart temperature
sensor intended for RFID temperature sensing. The BJT-based sensor employs an energy …

A 1.2-V 10-W NPN-Based Temperature Sensor in 65-nm CMOS With an Inaccuracy of 0.2 C (3) From 70 C to 125 C

F Sebastiano, LJ Breems, KAA Makinwa… - IEEE journal of solid …, 2010 - ieeexplore.ieee.org
An NPN-based temperature sensor with digital output has been realized in a 65-nm CMOS
process. It achieves a batch-calibrated inaccuracy of (3σ) and a trimmed inaccuracy of (3σ) …

A Temperature-to-Digital Converter for a MEMS-Based Programmable Oscillator With Frequency Stability and Integrated Jitter

MH Perrott, JC Salvia, FS Lee… - IEEE Journal of Solid …, 2012 - ieeexplore.ieee.org
MEMS-based oscillators offer a silicon-based alternative to quartz-based frequency
references. Here, a MEMS-based programmable oscillator is presented which achieves …

Smart temperature sensors in standard CMOS

KAA Makinwa - Procedia Engineering, 2010 - Elsevier
A smart temperature sensor is an integrated system consisting of a temperature sensor, its
bias circuitry and an analog-to-digital converter (ADC). When manufactured in CMOS …

Ultralow power circuit design for wireless sensor nodes for structural health monitoring

Y Lee, D Blaauw, D Sylvester - Proceedings of the IEEE, 2016 - ieeexplore.ieee.org
Wireless sensor nodes (WSNs) are essential elements for today's structural health
monitoring (SHM). As the design technology for WSNs evolves, there have been continuous …

A 0.12 mm 7.4 W Micropower Temperature Sensor With an Inaccuracy of 0.2C (3) From 30C to 125C

K Souri, KAA Makinwa - IEEE Journal of Solid-State Circuits, 2011 - ieeexplore.ieee.org
This paper describes the design of a CMOS smart temperature sensor intended for RFID
applications. The PNP-based sensor uses a digitally-assisted readout scheme that reduces …

A MEMS-Assisted Temperature Sensor With 20- Resolution, Conversion Rate of 200 S/s, and FOM of 0.04 pJK2

MH Roshan, S Zaliasl, K Joo, K Souri… - IEEE Journal of Solid …, 2016 - ieeexplore.ieee.org
This paper presents a dual-microelectromechanical system (MEMS) resonator-based
temperature sensor. In this sensor, the readout circuit estimates the temperature by …