Texture formation in titanium nitride films prepared by chemical vapor deposition
HE Cheng, MH Hon - Journal of applied physics, 1996 - pubs.aip.org
The< 100>,< 110>, and< 211> textured TiN films were obtained in a chemical vapor
deposition system using TiCl4, N2, and H2 as reaction gases. The microstructure of these …
deposition system using TiCl4, N2, and H2 as reaction gases. The microstructure of these …
Growth characteristics and properties of TiN coating by chemical vapor deposition
HE Cheng, MJ Chiang, MH Hon - Journal of The Electrochemical …, 1995 - iopscience.iop.org
Titanium nitride films obtained by chemical vapor deposition with TiC14, N2, and H2 as gas
sources at ambient pressure have been examined in this study. The results reveal that the …
sources at ambient pressure have been examined in this study. The results reveal that the …
Morphology and microstructure of TiN and Ti (N, C) thin layers
Z Wokulski - Crystal Research and Technology, 1991 - Wiley Online Library
Thin layers of TiN and Ti (N, C) solid solution were obtained by the CVD process, making
use of the following gas mixtures: TiCl4–N2–H2 for TiN and TiCl4–CCl4–N2–H2 for Ti (N …
use of the following gas mixtures: TiCl4–N2–H2 for TiN and TiCl4–CCl4–N2–H2 for Ti (N …
On the Microstructure of as‐Grown TiN Whisker‐Like Crystals
Z Wokulski - physica status solidi (a), 2001 - Wiley Online Library
The microstructure of as‐grown TiN whisker‐like crystals was examined using Lang X‐ray
topography, transmission electron microscopy (TEM) and also the Eshelby measurement of …
topography, transmission electron microscopy (TEM) and also the Eshelby measurement of …
Novel process for titanium nitride whisker synthesis and their use in alumina composites
V Revankar, R Hexemer, C Mroz - 1995 - osti.gov
Single crystal ceramic whiskers are viewed as an important reinforcement for ceramic, metal
and polymer matrix composites. Titanium nitride (TiN) exhibits high chemical stability in …
and polymer matrix composites. Titanium nitride (TiN) exhibits high chemical stability in …
[图书][B] An investigation of the temperature distribution induced during laser chemical vapor deposition (LCVD) of titanium nitride on titanium-aluminum-vanadium
MN Azer - 1996 - search.proquest.com
To understand how the substrate temperature influences the deposition rate and spatial
profile of deposits formed using laser chemical vapor deposition (LCVD), spatially resolved …
profile of deposits formed using laser chemical vapor deposition (LCVD), spatially resolved …
[引用][C] Precyzyjny pomiar parametrów sieciowych i jego zastosowanie do badania struktury kryształów roztworów stałych
K Wokulska - 1997 - Wydawn. Uniwersytetu Śląskiego