Power electronic systems have a great impact on modern society. Their applications target a
more sustainable future by minimizing the negative impacts of industrialization on the …

Collecting ambient energy to power various wearable electronics is considered a
prospective approach to addressing their energy consumption. Mechanical and thermal …

Microelectromechanical system (MEMS) pressure sensors based on silicon are widely used
and offer the benefits of miniaturization and high precision. However, they cannot easily …

The widespread application of bulk silicon carbide in pressure sensing has been largely
limited by the slow etching rate of traditional micromachining processes. This paper …

Silicon carbide has promising potential in high temperature pressure sensors due to its
excellent material properties. This paper presents a piezoresistive n-type 4H-SiC absolute …

Due to material plastic deformation and current leakage at high temperatures, SOI (silicon-
on-insulator) and SOS (silicon-on-sapphire) pressure sensors have difficulty working over …

Silicon carbide (SiC) is currently the preferred material for micro-electromechanical system
(MEMS) sensors used in extreme environments and it has been applied in many high …

Piezoresistive coefficients of materials are of great significance to the design of
piezoresistance based devices. This paper proposed an in situ extraction method to …

SiC is widely used in power electronics and high-temperature devices due to its
comprehensive physicochemical properties, including high thermal stability, mechanical …

In this study, we firstly reported a micro-pressure sensor based on self-supporting diamond-
like carbon (DLC)/Si 3 N 4/SiO 2 films with total thickness of 785 nm, where the DLC film was …