[PDF][PDF] Nanoscale displacement and strain measurement
Y Zhu, F Barthelat, PE Labossiere… - Proc. of the SEM Ann …, 2003 - academia.edu
The mechanical testing of micro-electro-mechanical systems (MEMS) and nano-electro-
mechanical systems (NEMS) requires precise measurements of displacement and strain in …
mechanical systems (NEMS) requires precise measurements of displacement and strain in …
[图书][B] MEMS testbed for accelerated testing of nanostructures
JCA Rueda - 2008 - search.proquest.com
Three types of MEMS devices were designed, modeled and fabricated. These devices
consisted of microhotplates, resonators (angular and horizontal) and uniaxial tensile testers …
consisted of microhotplates, resonators (angular and horizontal) and uniaxial tensile testers …