Ultraviolet optoelectronic devices based on AlGaN-SiC platform: Towards monolithic photonics integration system

C Huang, H Zhang, H Sun - Nano energy, 2020 - Elsevier
Rapid advancement of wide-bandgap AlGaN semiconductor materials offers tremendous
opportunities in the field of ultraviolet (UV) optoelectronics for a wide range of advanced …

Germicidal ultraviolet LEDs: A review of applications and semiconductor technologies

CJ Zollner, SP DenBaars, JS Speck… - Semiconductor …, 2021 - iopscience.iop.org
Ultraviolet light emitting diodes (UV LEDs) are one of the most promising technologies for
preventing future pandemics, improving health outcomes, and disinfecting water sources …

Influence of the nucleation layer morphology on the structural property of AlN films grown on c-plane sapphire by MOCVD

W Luo, L Li, Z Li, Q Yang, D Zhang, X Dong… - Journal of Alloys and …, 2017 - Elsevier
The influence of nucleation layer (NL) morphology on the structural property of AlN films
grown by metal organic chemical vapor deposition (MOCVD) has been investigated using …

Step-flow growth of Al droplet free AlN epilayers grown by plasma assisted molecular beam epitaxy

P Shao, S Li, Z Li, H Zhou, D Zhang… - Journal of Physics D …, 2022 - iopscience.iop.org
We have investigated an Al modulation epitaxy (AME) method to obtain step-flow growth of
Al droplet free AlN layers by plasma assisted molecular beam epitaxy (MBE). At the usual …

Molecular dynamics simulation of aluminum nitride deposition: temperature and N: Al ratio effects

L Zhang, H Yan, G Zhu, S Liu… - Royal Society Open …, 2018 - royalsocietypublishing.org
Heteroepitaxial growth of aluminum nitride (AIN) has been explored by experiments, but the
corresponding growth mechanism is still unrevealed. Here, we use molecular dynamics …

Multi-cycle RHEED oscillation under nitrogen supply in alternative source supply AlN growth by rf-MBE

M Kaneko, K Hirai, T Kimoto, J Suda - Applied Physics Express, 2020 - iopscience.iop.org
An alternative source supply sequence was applied to aluminum nitride (AlN) growth by rf-
plasma-assisted molecular-beam epitaxy on silicon carbide (SiC) substrates with a high …

Influence of nitrogen ion species on mass-selected low energy ion-assisted growth of epitaxial GaN thin films

M Mensing, P Schumacher, JW Gerlach, S Herath… - Applied Surface …, 2019 - Elsevier
The application of an energy and mass selected ion beam assisted deposition setup to
investigate the influence of hyperthermal atomic and molecular nitrogen ion species during …

Controlling Surface Morphology and Circumventing Secondary Phase Formation in Non-polar m-GaN by Tuning Nitrogen Activity

CW Chang, PV Wadekar, SS Guo, YJ Cheng… - Journal of Electronic …, 2018 - Springer
For the development of non-polar nitrides based optoelectronic devices, high-quality films
with smooth surfaces, free of defects or clusters, are critical. In this work, the mechanisms …

[PDF][PDF] Influence of nitrogen ion species on mass-selected low energy ion-assisted growth of epitaxial GaN thin films Michael Mensing, Philipp Schumacher, Jürgen W …

A Lotnyk, B Rauschenbach - researchgate.net
The application of an energy and mass selected ion beam assisted deposition setup to
investigate the influence of hyperthermal atomic and molecular nitrogen ion species during …