[HTML][HTML] Tutorial: Piezoelectric and magnetoelectric N/MEMS—Materials, devices, and applications
Nano-and micro-electromechanical systems (N/MEMSs) are traditionally based on
electrostatic or piezoelectric coupling, which couples electrical and mechanical energy …
electrostatic or piezoelectric coupling, which couples electrical and mechanical energy …
[图书][B] Infrared and terahertz detectors
A Rogalski - 2019 - books.google.com
This new edition of Infrared and Terahertz Detectors provides a comprehensive overview of
infrared and terahertz detector technology, from fundamental science to materials and …
infrared and terahertz detector technology, from fundamental science to materials and …
Micromachined Mechanical Resonant Sensors: From Materials, Structural Designs to Applications
Driving a micro and nanomechanical structure to resonance and observing its resonant
motion in the physical world have led to numerous fundamental discoveries in physics …
motion in the physical world have led to numerous fundamental discoveries in physics …
Ultrafast silicon nanomembrane microbolometer for long-wavelength infrared light detection
The microbolometer is the cornerstone device for imaging in the long-wavelength infrared
range (LWIR) at room temperature. The state-of-the-art commercial microbolometers usually …
range (LWIR) at room temperature. The state-of-the-art commercial microbolometers usually …
Graphene–aluminum nitride NEMS resonant infrared detector
The use of micro-/nanoelectromechanical resonators for the room temperature detection of
electromagnetic radiation at infrared frequencies has recently been investigated, showing …
electromagnetic radiation at infrared frequencies has recently been investigated, showing …
Shape memory polymer resonators as highly sensitive uncooled infrared detectors
Uncooled infrared detectors have enabled the rapid growth of thermal imaging applications.
These detectors are predominantly bolometers, reading out a pixel's temperature change …
These detectors are predominantly bolometers, reading out a pixel's temperature change …
-Pitch Electromechanical Resonator for Thermal Sensing
We provide here a demonstration of 12-μ m-pitch nanoelectromechanical resonant infrared
sensors with fully integrated capacitive transduction. A low-temperature fabrication process …
sensors with fully integrated capacitive transduction. A low-temperature fabrication process …
Nanoelectromechanical infrared detector
M Piller, N Luhmann, MH Chien… - … Sensing, Imaging, and …, 2019 - spiedigitallibrary.org
The sensitive detection of infrared (IR) radiation is a essential task in today's modern world.
The sensitivity of the state-of-the-art uncooled thermal infrared detectors is still several …
The sensitivity of the state-of-the-art uncooled thermal infrared detectors is still several …
Fast and high resolution thermal detector based on an aluminum nitride piezoelectric microelectromechanical resonator with an integrated suspended heat absorbing …
This letter presents a miniaturized, fast, and high resolution thermal detector, in which a heat
absorbing element and a temperature sensitive microelectromechanical system (MEMS) …
absorbing element and a temperature sensitive microelectromechanical system (MEMS) …
Wafer-level integration of high-quality bulk piezoelectric ceramics on silicon
EE Aktakka, RL Peterson… - IEEE transactions on …, 2013 - ieeexplore.ieee.org
In this paper, we present a new post-CMOS-compatible piezoelectric thin/thick film
technology that allows wafer-level integration of bulk piezoelectric ceramics such as lead …
technology that allows wafer-level integration of bulk piezoelectric ceramics such as lead …