The development of micro-gyroscope technology

K Liu, W Zhang, W Chen, K Li, F Dai… - Journal of …, 2009 - iopscience.iop.org
This review reports an overview and development of micro-gyroscope. The review first
presents different types of micro-gyroscopes. Micro-gyroscopes in this review are …

Vibration sensitivity analysis of MEMS vibratory ring gyroscopes

SW Yoon, S Lee, K Najafi - Sensors and Actuators A: Physical, 2011 - Elsevier
This paper presents a detailed model for possible vibration effects on MEMS degenerate
gyroscopes represented by vibratory ring gyroscopes. Ring gyroscopes are believed to be …

Dynamical analysis of an improved MEMS ring gyroscope encircled by piezoelectric film

F Liang, DD Liang, YJ Qian - International Journal of Mechanical Sciences, 2020 - Elsevier
Micro-electro-mechanical system (MEMS) gyroscope is an important sort of inertial sensor
for measuring the angular velocity of spinning structures, which has been extensively …

Pose error identification algorithm based on hemispherical resonant gyroscope assembly capacitance uniformity

H Yu, X Jin, XH Liu, DP Liu, ZX Li, SL Li, J Duan… - Measurement, 2022 - Elsevier
The assembly performance of hemispherical resonant gyroscope (HRG) is directly affected
by the spatial pose of the resonator and the electrode carrier, which can be reflected in the …

Nonlinear performance of MEMS vibratory ring gyroscope

F Liang, DD Liang, YJ Qian - Acta Mechanica Solida Sinica, 2021 - Springer
Micro-electro-mechanical system (MEMS) gyroscopes are an important sort of inertial sensor
for identifying parameters of spinning structures, such as the spinning speed and angular …

Modelling and dynamic analysis of a MEMS ring resonator supported by circular curved shaped inner beams

AR Ranji, J Guo, S Alirezaee, MJ Ahamed - Physica Scripta, 2023 - iopscience.iop.org
Microelectromechanical systems (MEMS) based ring shaped resonators usually have a ring
supported by spoke shaped springs. In this paper, we developed a general analytical model …

Effect of uneven electrostatic forces on the dynamic characteristics of capacitive hemispherical resonator gyroscopes

Z Xu, G Yi, MJ Er, C Huang - Sensors, 2019 - mdpi.com
The hemispherical resonator gyroscope (HRG) is a typical capacitive Coriolis vibratory
gyroscope whose performance is inevitably influenced by the uneven electrostatic forces …

Controller design of a MEMS gyro-accelerometer with a single proof mass

WT Sung, TS Kang, JG Lee - International Journal of Control …, 2008 - koreascience.kr
This paper presents a parametric study on the controller design scheme for a gyro-
accelerometer to have robust performance under some parameter variations. In particular …

Simulation and fabrication of a convective gyroscope

DV Dao, T Shiozawa, S Sugiyama - IEEE Sensors Journal, 2008 - ieeexplore.ieee.org
In this paper, we present the simulation and fabrication of the gas gyroscope. The gas flow
inside the hermetically packed sensor is simulated by utilizing 3-D transient compressible …

Design and analysis of a z-axis tuning fork gyroscope with guided-mechanical coupling

TQ Trinh, LQ Nguyen, DV Dao, HM Chu… - Microsystem …, 2014 - Springer
This paper presents design and analysis of a z-axis tuning fork gyroscope. The sensor is
designed to reduce noises and improve the sensitivity by using a drive coupling spring in the …