Cluster tools are automated robotic manufacturing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …

Scheduling of a robotic flow shop, where a dual-gripper robot transports parts between
machines, is addressed with a makespan measure. Most previous studies on robotic flow …

Cluster tools, each of which consists of multiple processing modules, one material handling
robot, and loadlocks, are widely used for wafer fabrication processes, such as lithography …

Multiple heterogeneous applications concurrently run in distributed cloud data centers
(CDCs) for better performance and lower cost. There is a highly challenging problem of how …

This paper proposes the research method to comprehensively apply the time Petri net model
and the Flexsim simulation model by taking interior assembling and production logistics …

A dual-gripper robotic cell consists of multiple processing machines and one material
handling robot, which can perform an unloading or a loading task one at a time but can hold …

As wafer circuit widths shrink down, wafer fabrication processes require stringent quality
control. Therefore, fabs recently tend to clean a chamber after processing each wafer, in …

A cluster tool that consists of several processing modules, a transport robot, and loadlocks is
widely used for wafer processing in the semiconductor industry. The cluster tool repeats an …

This work investigates a scheduling problem of deadlock-prone flexible manufacturing
systems modeled by place-timed Petri nets. It proposes an anytime branch and bound …

Cluster tools, which consist of processing modules (PMs) and a transport robot, are used for
wafer fabrication processes in semiconductor manufacturing fabs. Once processing of a …