Surface acoustic wave devices for sensor applications

B Liu, X Chen, H Cai, MM Ali, X Tian… - Journal of …, 2016 - iopscience.iop.org
Surface acoustic wave (SAW) devices have been widely used in different fields and will
continue to be of great importance in the foreseeable future. These devices are compact …

Progress of optomechanical micro/nano sensors: a review

X Liu, W Liu, Z Ren, Y Ma, B Dong… - International Journal of …, 2021 - Taylor & Francis
Optomechanical sensing based on the coupling between mechanical motions and optical
resonances has attracted huge interest in sensor applications due to its small footprint, high …

[HTML][HTML] The development of micromachined gyroscope structure and circuitry technology

D Xia, C Yu, L Kong - Sensors, 2014 - mdpi.com
This review surveys micromachined gyroscope structure and circuitry technology. The
principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS …

[HTML][HTML] Trends and applications of surface and bulk acoustic wave devices: a review

Y Yang, C Dejous, H Hallil - Micromachines, 2022 - mdpi.com
The past few decades have witnessed the ultra-fast development of wireless
telecommunication systems, such as mobile communication, global positioning, and data …

[HTML][HTML] Aerosol jet printing of surface acoustic wave microfluidic devices

J Rich, B Cole, T Li, B Lu, H Fu, BN Smith… - Microsystems & …, 2024 - nature.com
The addition of surface acoustic wave (SAW) technologies to microfluidics has greatly
advanced lab-on-a-chip applications due to their unique and powerful attributes, including …

[HTML][HTML] A novel progressive wave gyroscope based on acousto-optic effects

L Tian, Q Shen, H Chang - Microsystems & Nanoengineering, 2022 - nature.com
We propose and numerically investigate a brand-new, high-sensitivity progressive wave
gyroscope based on acousto-optic effects for the measurement of rotational angular velocity …

Novel on chip rotation detection based on the acousto-optic effect in surface acoustic wave gyroscopes

M Mahmoud, A Mahmoud, L Cai, M Khan… - Optics express, 2018 - opg.optica.org
An Acousto-Optic Gyroscope (AOG) consisting of a photonic integrated device embedded
into two inherently matched piezoelectric surface acoustic wave (SAW) resonators sharing …

Development of a high-sensitivity strain measurement system based on a SH SAW sensor

H Oh, K Lee, K Eun, SH Choa… - … of Micromechanics and …, 2012 - iopscience.iop.org
A strain measurement system based on a shear horizontal surface acoustic wave (SH SAW)
was developed. The developed system is composed of a SAW microsensor, a printed circuit …

MEMS-based hemispherical resonator gyroscopes

P Pai, FK Chowdhury, CH Mastrangelo… - SENSORS, 2012 …, 2012 - ieeexplore.ieee.org
This paper introduces a fabrication technique that uses planar MEMS micromachining
processes to produce hemispherical resonating shells for gyroscopes. The hemispheres …

[HTML][HTML] A toroidal SAW gyroscope with focused IDTs for sensitivity enhancement

L Tian, H Zhao, Q Shen, H Chang - Microsystems & Nanoengineering, 2024 - nature.com
A surface acoustic wave (SAW) gyroscope measures the rate of rotational angular velocity
by exploiting a phenomenon known as the SAW gyroscope effect. Such a gyroscope is a …