Determination of angle dependence of sputtering yield for a multicomponent target by the time characteristics of the sputtering process
IA Melnichuk, AA Bogunets, RA Kapshukov… - Bulletin of the Russian …, 2010 - Springer
A method for determining the variations of sputtering yield of multicomponent target based
on studies of time characteristics of the sputtered particles flux has been proposed and …
on studies of time characteristics of the sputtered particles flux has been proposed and …
[PDF][PDF] Influence of the irradiation doze and temperature on the flux of ejecting atoms during relief formation on Mg surface by Ar⁺ sputtering
IN Starshinov, IA Melnichuk - Functional materials, 2010 - dspace.nbuv.gov.ua
The time dependences of the evaporation and sputtering rate of magnesium under
irradiation by 20 keV argon ions have been determined at the temperatures sufficient for …
irradiation by 20 keV argon ions have been determined at the temperatures sufficient for …