A review of the methods and results of atomistic modeling of the deposition of thin optical
films and a calculation of their characteristics is presented. The simulation of various …

A three-dimensional kinetic Monte Carlo (KMC) model has been developed and used to
simulate the microstructure and growth morphology of cubic transition metal nitride (TMN) …

Ultra thin platinum films were grown by dc magnetron sputtering on thermally oxidized Si
(100) substrates. The electrical resistance of the films was monitored in situ during growth …

以Cu 膜为例, 用Monte/Carlo 算法模拟了薄膜生长的随机过程, 并提出了更加完善的模型.
在合理选择原子间相互作用计算方法的基础上, 考虑了原子的吸附, 在生长表面的迁移及迁移所 …

We present a powerful kinetic Monte Carlo (KMC) algorithm that allows one to simulate the
growth of nanocrystalline silicon by plasma enhanced chemical vapor deposition (PECVD) …

The deposition of polycrystalline thin films is essential to the fabrication of microelectronic
devices. About half of the processing steps are devoted to deposition of metal conductors …

A two-dimensional cross-sectional poly-lattice kinetic Monte Carlo (2DCSP-KMC) model has
been developed for simulation of the electrodeposition of polycrystalline copper on either a …

A three-dimensional kinetic Monte Carlo technique has been developed for simulating the
nucleation and growth of thin films. The model involves incident atom attachment, surface …

摘要用Monte Carlo 方法以Cu 为例对薄膜生长过程进行了计算机模拟. 不仅对原子的吸附,
迁移及脱附三种过程采用了更为合理的模型, 还考虑了这些过程发生时对近邻原子的连带效应 …

摘要以Cu 膜为例, 用Monte Carlo 算法模拟了薄膜生长的随机过程. 找到了生长过程中的三个
优化温度, 并研究了它们的渐近一致性, 同时对各种温度区间内表面粗糙度, 相对密度随入射率的 …