High figure-of-merit Lamb wave resonators based on Al0. 7Sc0. 3N thin film
This work reports the Lamb wave resonator based on Al 0.7 Sc 0.3 N thin films using
magnetron sputtering with a single alloy target. The resonator fabrication process based on …
magnetron sputtering with a single alloy target. The resonator fabrication process based on …
High Exceeding 6.4% Through Metal Frames in Aluminum Nitride 2-D Mode Resonators
C Cassella… - IEEE transactions on …, 2019 - ieeexplore.ieee.org
This work describes a new method to enhance the electromechanical coupling coefficient (kt
2) of 2-D mode resonators (2DMRs). This approach exploits the multimodal excitation of …
2) of 2-D mode resonators (2DMRs). This approach exploits the multimodal excitation of …
Q-enhanced lithium niobate SH0 resonators with optimized acoustic boundaries
In this work, a quality factor (Q) enhancement technique has been investigated for the
fundamental shear-horizontal (SH0) mode lithium niobate resonators. Four supporting tether …
fundamental shear-horizontal (SH0) mode lithium niobate resonators. Four supporting tether …
Rapid harmonic analysis of piezoelectric mems resonators
JM Puder, JS Pulskamp, RQ Rudy… - IEEE Transactions …, 2018 - ieeexplore.ieee.org
This paper reports on a novel simulation method combining the speed of analytical
evaluation with the accuracy of finite-element analysis (FEA). This method is known as the …
evaluation with the accuracy of finite-element analysis (FEA). This method is known as the …
[PDF][PDF] 750 MHz Zero-Power MEMS-Based Wake-Up Receiver with-60 dBm Sensitivity
C Cassella, M Assylbekova… - 2018 Solid …, 2018 - transducer-research-foundation.org
In this work, we present the first fully-passive RF wake-up receiver (WUR). The WUR relies
on a solid-state envelope detector (ED) and a MEMS-based cantilever switch (RS) acting as …
on a solid-state envelope detector (ED) and a MEMS-based cantilever switch (RS) acting as …
Aln Hybrid-Coupled Resonators With High Acoustic Velocity Layer
This article introduces a kind of quasi-surface and bulk acoustic wave (SAW/BAW) hybrid-
coupled resonator implemented on aluminum nitride (AlN) thin film with a high acoustic …
coupled resonator implemented on aluminum nitride (AlN) thin film with a high acoustic …
Active Enhancement in the kt2·Q of Two-Port AlN Resonators for Low-Loss Filtering
An active method to boost the figure-of-merit (FoM, defined as the product of quality factor, Q,
and electromechanical coupling coefficient, ki 2) of a 54.7 MHz 4-terminal aluminum nitride …
and electromechanical coupling coefficient, ki 2) of a 54.7 MHz 4-terminal aluminum nitride …
Micro and Nano Electromechanical Systems for Near-Zero Power Infrared Detection
Z Qian - 2017 - search.proquest.com
Light is one of the most important tools for human beings to probe and sense the physical
world. Infrared (IR) radiation located in longer wavelengths than those of visible light carries …
world. Infrared (IR) radiation located in longer wavelengths than those of visible light carries …
RF Front-End Components Based on Linear-Time-Variant Modulation of Piezoelectric MEMS Resonators
G Michetti - 2022 - search.proquest.com
Throughout the last decade, radio frequency (RF) components for over-the-air
communication and sensing have been subject to sustained market pressure to adapt to the …
communication and sensing have been subject to sustained market pressure to adapt to the …
Piezoelectric Micro-Resonators for Low-Power and Low-Cost Internet of Things Communication Nodes
G Chen - 2019 - search.proquest.com
Abstract Internet of Things (IoT) is a set of technologies that collect distributed data on
anything, from daily life objects to more sophisticated devices such physical/chemical …
anything, from daily life objects to more sophisticated devices such physical/chemical …