New development of atomic layer deposition: processes, methods and applications
Atomic layer deposition (ALD) is an ultra-thin film deposition technique that has found many
applications owing to its distinct abilities. They include uniform deposition of conformal films …
applications owing to its distinct abilities. They include uniform deposition of conformal films …
Operating pressure influences over micro trenches in exposure time introduced atomic layer deposition
Tremendous interest has been placed on the atomic layer deposition (ALD) process as a
thin film deposition technique capacity to deposit quality thin films. However, further …
thin film deposition technique capacity to deposit quality thin films. However, further …
The Numerical Investigation on the Fundamental Physical Flow and Chemical Phenomena Within the Atomic Layer Deposition Process
RAM Coetzee - 2020 - search.proquest.com
Nanotechnology has become an essential requirement in the progression and development
of cutting edge technologies. The pursuit of nano-precision has led to a continuous need to …
of cutting edge technologies. The pursuit of nano-precision has led to a continuous need to …