A review of micro/nano welding and its future developments
KW Guo - Recent patents on Nanotechnology, 2009 - ingentaconnect.com
A review is given about the current state-of-the-art surrounding micro/nano scale
welding/joining used in miniaturization or microsystems. Except for reviewing the …
welding/joining used in miniaturization or microsystems. Except for reviewing the …
Low-stress CMOS-compatible silicon carbide surface-micromachining technology—Part I: Process development and characterization
F Nabki, TA Dusatko, S Vengallatore… - Journal of …, 2011 - ieeexplore.ieee.org
A low-temperature (<; 300° C) low-stress microelectromechanical systems fabrication
process based on a silicon carbide structural layer is presented. A partially conductive …
process based on a silicon carbide structural layer is presented. A partially conductive …
[PDF][PDF] Design and simulation of microelectromechanical system capacitive shunt switches
Problem statement: RF MEMS switch is one of MEMS area that creates devices that have
great potential to improve the performance of communication circuits and systems and …
great potential to improve the performance of communication circuits and systems and …
Multi-response optimization of ultrathin poly-SiGe films characteristics for nano-electromechanical systems (NEMS) using the grey-Taguchi technique
Poly-SiGe can be used for monolithically integrating Micro/Nano-ElectroMechanical
Systems (M/NEMS) with its driving circuitry in a MEMS-last approach. For these applications …
Systems (M/NEMS) with its driving circuitry in a MEMS-last approach. For these applications …
A 77 GHz BCB Based High Performance Antenna Array for Autonomous Vehicle Radars
S Chatterjee - 2018 - search.proquest.com
A 77 GHz BCB BASED HIGH PERFORMANCE ANTENNA ARRAY FOR AUTONOMOUS
VEHICLE RADARS by Sreejit Chatterjee A Thesis Submitted to the Page 1 A 77 GHz BCB …
VEHICLE RADARS by Sreejit Chatterjee A Thesis Submitted to the Page 1 A 77 GHz BCB …
Optimal Conditions for Micromachining at 210
S Sedky, A Bayoumy, A Alaa, A Nagy… - Journal of …, 2007 - ieeexplore.ieee.org
This paper investigates the possibility of reducing the deposition temperature of silicon-
germanium (Si 1-x Ge x) thin films to 210degC and tuning the physical properties of the film …
germanium (Si 1-x Ge x) thin films to 210degC and tuning the physical properties of the film …
A 77 GHz reconfigurable micromachined microstrip antenna array
I Hamieh - 2012 - scholar.uwindsor.ca
A micromachined silicon based MEMS single-pole-Single-Throw (SPST) switches
embedded reconfigurable microstrip antenna array for use in a 77 GHz tri-mode automotive …
embedded reconfigurable microstrip antenna array for use in a 77 GHz tri-mode automotive …
Thickness effect on the structural and electrical properties of poly-SiGe films
TB Asafa, A Witvrouw, D Schneider, A Moussa… - Materials Research …, 2014 - Elsevier
As lateral dimensions of electromechanical devices are scaled down to length scales
comparable to electron mean free paths, the influence of thickness effect on their properties …
comparable to electron mean free paths, the influence of thickness effect on their properties …
Influence of germanium incorporation on the structural and electrical properties of boron-doped ultrathin poly-Si1−x Ge x films …
A few properties of polycrystalline silicon germanium (poly-Si 1− x Ge x) films can be tailored
by modulating the germanium incorporation. In this paper, the structural, mechanical and …
by modulating the germanium incorporation. In this paper, the structural, mechanical and …
Challenges and solutions for cost-effective RF-MEMS packaging
A Morris, S Cunningham - 2007 32nd IEEE/CPMT International …, 2007 - ieeexplore.ieee.org
Packaging poses a critical challenge for commercialization of MEMS (micro-electro-
mechanical system) products. The packaging provides the critical structural and …
mechanical system) products. The packaging provides the critical structural and …