Effect of an inhomogeneous electron density profile on the transmission microwave frequency spectrum of the cutoff probe
The cutoff probe (CP), which precisely measures electron density from a microwave
transmission (S 21) spectrum, has been successfully developed through physical models …
transmission (S 21) spectrum, has been successfully developed through physical models …
An electrostatic model of the cutoff probe
Although a circuit model of the previously developed cutoff probe for plasma diagnostics
elucidates the basic physics and contributes to the development of the cutoff probe, a …
elucidates the basic physics and contributes to the development of the cutoff probe, a …
Analysis on crossing frequency in transmission microwave frequency spectrum of the cutoff probe
S Kim, Y Lee, C Cho, I Seong, W Jeong, J Lee… - Physics of …, 2023 - pubs.aip.org
Recently, we developed a crossing frequency method using the cutoff probe, which is
believed as applicable for measuring electron density regardless of chamber pressures …
believed as applicable for measuring electron density regardless of chamber pressures …