Microsystems with capabilities of acoustic signal perception and recognition are widely used
in unattended monitoring applications. In order to realize long-term and large-scale …

At the era of powerful computers, it's tempting to employ finite element models early in the
design phase of a device. However, especially for MEMS devices, the dimensional ratios …

Currently, the most advanced micromachined microphones on the market are based on a
capacitive coupling principle. Capacitive micro-electromechanical-system-based (MEMS) …

A wind tunnel experiment is an important way and effective method to research the
generation mechanism of aerodynamic noise and verify aerodynamic noise reduction …

This paper illustrates the design of a piezoelectric acoustic sensor based on AlN to be used
for aero-acoustic measurements. A significant prerequisite for such sensors is a large sound …

The relatively low piezoelectric constant of aluminum nitride (AlN) piezoelectric film limits the
development and application of the acoustic field performance of AlN-based micromachined …

This work presents the design of a piezoelectric based MEMS acoustic sensor for low
frequency applications. The sensor design is based on MEMS-CAD-tool Coventorware. The …