Acoustic wake-up technology for microsystems: a review
D Yang, J Zhao - Micromachines, 2023 - mdpi.com
Microsystems with capabilities of acoustic signal perception and recognition are widely used
in unattended monitoring applications. In order to realize long-term and large-scale …
in unattended monitoring applications. In order to realize long-term and large-scale …
Equivalent Electrical Circuits for Electroacoustic MEMS Design: A Review
R Liechti - Journal of Micromechanics and Microengineering, 2024 - iopscience.iop.org
At the era of powerful computers, it's tempting to employ finite element models early in the
design phase of a device. However, especially for MEMS devices, the dimensional ratios …
design phase of a device. However, especially for MEMS devices, the dimensional ratios …
[HTML][HTML] Piezoelectric Micromachined Microphone with High Acoustic Overload Point and with Electrically Controlled Sensitivity
Currently, the most advanced micromachined microphones on the market are based on a
capacitive coupling principle. Capacitive micro-electromechanical-system-based (MEMS) …
capacitive coupling principle. Capacitive micro-electromechanical-system-based (MEMS) …
Design and Optimization of a BAW Microphone Sensor
H Guo, J Li, T Liu, M Feng, Y Gao - Micromachines, 2022 - mdpi.com
A wind tunnel experiment is an important way and effective method to research the
generation mechanism of aerodynamic noise and verify aerodynamic noise reduction …
generation mechanism of aerodynamic noise and verify aerodynamic noise reduction …
Design and Modeling of Piezoelectric-AlN-based Acoustic Sensor for Sound Pressure Level Measurements
This paper illustrates the design of a piezoelectric acoustic sensor based on AlN to be used
for aero-acoustic measurements. A significant prerequisite for such sensors is a large sound …
for aero-acoustic measurements. A significant prerequisite for such sensors is a large sound …
Simulation and Optimization of Piezoelectric Micromachined Ultrasonic Transducer Unit Based on AlN
X Su, X Ren, H Wan, X Jiang, X Liu - Electronics, 2022 - mdpi.com
The relatively low piezoelectric constant of aluminum nitride (AlN) piezoelectric film limits the
development and application of the acoustic field performance of AlN-based micromachined …
development and application of the acoustic field performance of AlN-based micromachined …
MEMS Acoustic Sensor for Low Frequency Applications
This work presents the design of a piezoelectric based MEMS acoustic sensor for low
frequency applications. The sensor design is based on MEMS-CAD-tool Coventorware. The …
frequency applications. The sensor design is based on MEMS-CAD-tool Coventorware. The …