This paper presents a comprehensive study on radio frequency-microelectromechanical
systems (RF-MEMS) switches, which are expected to be extensively integrated into 5G …

In this paper, a new type of Radio Frequency Micro-Electro-Mechanical System (RF-MEMS)
shunt capacitive switch is designed and studied. RF MEMS switch has a number of …

In this paper, we present the design and development of a Radio Frequency Micro-Electro-
Mechanical-Systems (RF-MEMS) capacitive shunt switch based on a fixed-fixed beam …

Shunt capacitive radio-frequency microelectromechanical system (RF MEMS) switches were
fabricated on silicon substrate and characterized in the RF domain. Various switch …

The paper investigates the actuation mechanism in floating electrode
microelectromechanical system capacitive switches. It is demonstrated that in the pull-in …

This paper reports on the successive improvements introduced in the shunt switches
fabricated with the RF MEMS multiuser technology platform available at FBK. In the course …

This paper reports about the effect of fabrication process induced changes on scattering
parameters of RF MEMS switch structure with meander geometry for 18–40 GHz (Ka-band) …

RF MEMS capacitive switches using leaky nanodiamond as a dielectric film are studied and
compared with those using Si 3 N 4. Characteristics of dielectric charging and discharging …

A challenge in designing a RF MEMS switch is the determination of its parameters to satisfy
the application requirements. Often this is done through a set of comprehensive time …

The impact of ambient on the field emission and the resulting breakdown induced damage
of rigid MEMS capacitive structure are investigated. The effect of asperities burning due to …