Optimization of X-axis servo drive performance using PSO fuzzy control technique for double-axis dicing saw

W Cao, P Zhang, Q Mi, Y Sun, J Shi, W Liang - Scientific Reports, 2023 - nature.com
The dicing saw is a critical piece of equipment in IC processing, primarily used to cut wafers.
Due to the high spindle speed, even small errors in the cutting process can result in wafer …

FPGA-Based Speed Control Strategy of PMSM Using Improved Beetle Antennae Search Algorithm

C Wu, K Zhang, X Zhang - Energies, 2024 - mdpi.com
To improve performance in terms of overshoot and motor response speed when a
permanent-magnet synchronous motor (PMSM) with a proportional–integral (PI) controller is …

Chipping value prediction for dicing saw based on sparrow search algorithm and neural networks

J Shi, P Zhang, S Du, W Liang, W Cao, Q Li… - The Journal of …, 2024 - Springer
Wafer dicing is a key step in the manufacturing process of semiconductor integrated circuits,
and the quality of dicing directly affects the dimensional accuracy and economic benefits of …

Permanent magnet synchronous motor parameter identification based on improved adaptive extended Kalman filter

X Li, W Wang, X Wang - 2022 IEEE 4th International …, 2022 - ieeexplore.ieee.org
The electromagnetic parameters of the permanent magnet synchronous motor (PMSM) will
change influenced by certain factors like temperature and magnetic circuit saturation, which …

Parameter Identification Based on Chaotic Map Simulated Annealing Genetic Algorithm for PMSWG

Y Zhang, C Zhang, Z Cheng - Progress in Electromagnetics Research M, 2022 - jpier.org
Traditional genetic algorithm identification of permanent magnet synchronous wind
generator (PMSWG) parameters is easy to fall into local optimum, resulting in low accuracy …