MEMS laser scanners: a review

STS Holmström, U Baran, H Urey - Journal of …, 2014 - ieeexplore.ieee.org
Laser scanners have been an integral part of MEMS research for more than three decades.
During the last decade, miniaturized projection displays and various medical-imaging …

Scanning and actuation techniques for cantilever-based fiber optic endoscopic scanners—a review

M Kaur, PM Lane, C Menon - Sensors, 2021 - mdpi.com
Endoscopes are used routinely in modern medicine for in-vivo imaging of luminal organs.
Technical advances in the micro-electro-mechanical system (MEMS) and optical fields have …

Lidar system with nonmechanical electrowetting-based wide-angle beam steering

M Zohrabi, WY Lim, RH Cormack, OD Supekar… - Optics express, 2019 - opg.optica.org
A light detection and ranging (lidar) system with±90° of steering based on an adaptive
electrowetting-based prism for nonmechanical beam steering has been demonstrated …

MEMS scanning mirrors for optical coherence tomography

C Gorecki, S Bargiel - Photonics, 2020 - mdpi.com
This contribution presents an overview of advances in scanning micromirrors based on
MEMS (Micro-electro-mechanical systems) technologies to achieve beam scanning for OCT …

Technical concepts of automotive LiDAR sensors: a review

H Holzhüter, J Bödewadt, S Bayesteh… - Optical …, 2023 - spiedigitallibrary.org
Automotive LiDAR sensors are seen by many as the enabling technology for higher-level
autonomous driving functionalities. Different concepts to design such a sensor can be found …

Temperature stability study of resonant angular scanning micromirrors with electrostatic comb-drive actuators

Y Cao, P Wang, J Li, H Xie - Sensors and Actuators A: Physical, 2021 - Elsevier
Resonant rotational scanning micromirrors with electrostatic comb-drive actuators are widely
used in generating structured lights for 3D sensing, but their resonant scanning stability is …

Exploiting digital {Micro-Mirror} devices for ambient light communication

T Xu, MC Tapia, M Zúñiga - 19th USENIX Symposium on Networked …, 2022 - usenix.org
There is a growing interest in exploiting ambient light for wireless communication. This new
research area has two key advantages: it utilizes a free portion of the spectrum and does not …

The fabrication of 2D micromirror with large electromagnetic driving forces

B Jiang, M Peng, Y Liu, T Zhou, Y Su - Sensors and Actuators A: Physical, 2019 - Elsevier
The two dimensional micromirror works as a resonant actuator applied in light detection and
ranging (LiDAR) devices. A deep embedded coils design was applied here to provide a …

External electromagnet FPCB micromirror for large angle laser scanning

KGK Periyasamy, VJ Tan, S He, N Kourtzanidis - Micromachines, 2019 - mdpi.com
An external electromagnet plus moving PM (permanent magnet) FPCB (flexible printed
circuit board) micromirror is proposed in this paper that can overcome two limitations …

Microstructuring of carbon nanotubes-nickel nanocomposite

Z An, L He, M Toda, G Yamamoto, T Hashida… - …, 2015 - iopscience.iop.org
In this paper, we develop a novel electroplating method for the synthesis of carbon
nanotubes (CNTs)-nickel (Ni) nanocomposite, and present the fabrication of a silicon …