Comparison of methods to quantify interface trap densities at dielectric/III-V semiconductor interfaces

R Engel-Herbert, Y Hwang, S Stemmer - Journal of applied physics, 2010 - pubs.aip.org
Methods to extract trap densities at high-permittivity (k) dielectric/III-V semiconductor
interfaces and their distribution in the semiconductor band gap are compared. The …

The Characterization and Passivation of Fixed Oxide Charges and Interface States in the MOS System

PK Hurley, É O'Connor, V Djara… - … on Device and …, 2013 - ieeexplore.ieee.org
In this paper, we present a review of experimental results examining charged defect
components in the Al 2 O 3/In 0.53 Ga 0.47 As metal-oxide-semiconductor (MOS) system …

Enhancement-mode hydrogenated diamond metal-oxide-semiconductor field-effect transistors with Y2O3 oxide insulator grown by electron beam evaporator

JW Liu, H Oosato, MY Liao, Y Koide - Applied Physics Letters, 2017 - pubs.aip.org
Enhancement-mode (E-mode) hydrogenated diamond (H-diamond) metal-oxide-
semiconductor field-effect transistors (MOSFETs) are fabricated with an Y 2 O 3 oxide …

Comparative Study of Atomic-Layer-Deposited Stacked (HfO2/Al2O3) and Nanolaminated (HfAlOx) Dielectrics on In0.53Ga0.47As

C Mahata, YC Byun, CH An, S Choi… - ACS Applied Materials …, 2013 - ACS Publications
The high-k gate dielectric structures in stacked (HfO2/Al2O3) and nanolaminated (HfAlO x)
forms with a similar apparent accumulation capacitance were atomic-layer-deposited on n …

Electrical characteristics of hydrogen-terminated diamond metal-oxide-semiconductor with atomic layer deposited HfO2 as gate dielectric

JW Liu, MY Liao, M Imura, H Oosato… - Applied Physics …, 2013 - pubs.aip.org
HfO 2 films have been deposited on hydrogen-terminated diamond (H-diamond) by an
atomic layer deposition (ALD) technique at 120 C. Effect of rapid thermal annealing …

An investigation of capacitance-voltage hysteresis in metal/high-k/In0. 53Ga0. 47As metal-oxide-semiconductor capacitors

J Lin, YY Gomeniuk, S Monaghan, IM Povey… - Journal of Applied …, 2013 - pubs.aip.org
In this work, we present the results of an investigation into charge trapping in metal/high-k/In
0.53 Ga 0.47 As metal-oxide-semiconductor capacitors (MOS capacitors), which is analysed …

Comparison of vacancy and antisite defects in GaAs and InGaAs through hybrid functionals

HP Komsa, A Pasquarello - Journal of Physics: Condensed …, 2012 - iopscience.iop.org
The formation energies and charge transition levels of vacancy and antisite defects in GaAs
and In 0.5 Ga 0.5 As are calculated through hybrid density functionals. In As-rich conditions …

Realization of high-quality HfO2 on In0. 53Ga0. 47As by in-situ atomic-layer-deposition

TD Lin, YH Chang, CA Lin, ML Huang, WC Lee… - Applied Physics …, 2012 - pubs.aip.org
High κ dielectric of HfAlO/HfO 2 was an in-situ atomic-layer-deposited directly on molecular
beam epitaxy grown In 0.53 Ga 0.47 As surface without using pre-treatments or interfacial …

Quantification of trap densities at dielectric/III–V semiconductor interfaces

R Engel-Herbert, Y Hwang, S Stemmer - Applied Physics Letters, 2010 - pubs.aip.org
High-frequency capacitance-voltage curves for capacitors with high-k gate dielectrics and III–
V semiconductor channels are modeled. The model takes into account the low conduction …

The physical origin of dispersion in accumulation in InGaAs based metal oxide semiconductor gate stacks

I Krylov, D Ritter, M Eizenberg - Journal of Applied Physics, 2015 - pubs.aip.org
Dispersion in accumulation is a widely observed phenomenon in technologically important
InGaAs gate stacks. Two principal different interface defects were proposed as the physical …