Chip-scale atomic devices combine elements of precision atomic spectroscopy, silicon
micromachining, and advanced diode laser technology to create compact, low-power, and …

This paper reports on the Si-glass anodic bonding process to fill micro Cs vapor cells with a
buffer gas (Ar or Ne) at a controlled pressure (up to 20kPa), which is one of the technological …

The present invention relates to a method for producing a microfabricated atomic vapor cell,
including a step of forming at least one cavity in a substrate and closing the cavity at one …

This paper introduces a batch fabrication method to manufacture micro-electromechanical
system (MEMS) components for nuclear magnetic resonance (NMR) atomic sensors, such …

Microfabricated alkali metal vapor cells are the core components for miniaturizing quantum
devices, such as atomic clocks, atomic gyroscopes, and atomic magnetometers. Alkali …

We report an aging study on micro-fabricated alkali vapor cells using neon as a buffer gas.
An experimental atomic clock setup is used to measure the cell's intrinsic frequency, by …

We report the characterization of dark line resonances observed in Cs vapor microcells filled
with a unique neon (Ne) buffer gas. The impact on the coherent population trapping (CPT) …

Microwave atomic clocks are timing devices in which the microwave oscillator is stabilized to
the hyperfine transition of alkali atoms. Owing to their excellent precision and stability, the …

MEMS atomic vapor cells have a large variety of applications in chip-scale atomic devices
such as clocks, gyroscopes or magnetometers. These cells are usually hermetically sealed …

We measure the resonance line shape of atomic-vapor layers with nanoscale thickness
confined between two sapphire windows. The measurement is performed by scanning a …