Simulation for manufacturing system design and operation: Literature review and analysis

A Negahban, JS Smith - Journal of manufacturing systems, 2014 - Elsevier
This paper provides a comprehensive review of discrete event simulation publications
published between 2002 and 2013 with a particular focus on applications in manufacturing …

[图书][B] Production planning and control for semiconductor wafer fabrication facilities: modeling, analysis, and systems

L Mönch, JW Fowler, SJ Mason - 2012 - books.google.com
Over the last fifty-plus years, the increased complexity and speed of integrated circuits have
radically changed our world. Today, semiconductor manufacturing is perhaps the most …

A literature survey on the design approaches and operational issues of automated wafer-transport systems for wafer fabs

JR Montoya-Torres - Production Planning & Control, 2006 - Taylor & Francis
The goal of operations management is to provide design methods for production systems
that are inexpensive to construct and efficient to operate. When addressing the shop design …

A survey of automated material handling systems in 300-mm SemiconductorFabs

GK Agrawal, SS Heragu - IEEE transactions on semiconductor …, 2006 - ieeexplore.ieee.org
The fast-paced developments and technological breakthroughs in the semiconductor
manufacturing industry elevates the importance of optimum utilization of resources. The …

A survey of dispatching rules for operational control in wafer fabrication

SC Sarin, A Varadarajan, L Wang - Production Planning and …, 2011 - Taylor & Francis
Production scheduling in semiconductor wafer fabs is a non-trivial task owing to the
complexity of wafer fabrication. Dispatching rules are the most commonly used tools for shop …

Hyperparameter Tuning with Gaussian Processes for Optimal Abstraction Control in Simulation-based Optimization of Smart Semiconductor Manufacturing Systems

MG Seok, WJ Tan, B Su, W Cai, J Kwon… - ACM Transactions on …, 2024 - dl.acm.org
Smart manufacturing utilizes digital twins that are virtual forms of their production plants for
analyzing and optimizing decisions. Digital twins have been mainly developed as discrete …

A survey of dispatching rules for operational control in wafer fabrication

A Varadarajan, SC Sarin - IFAC Proceedings Volumes, 2006 - Elsevier
Production scheduling in semiconductor wafer fabs is a nontrivial task owing to the
complexity of wafer fabrication. Dispatching rules are the most commonly used tools for shop …

Visual Exploration and Planning of the Automated Material Handling System for Smart Factory in the Immersive Environment

Y Zhang, Y Li, X Xue, J Feng… - 2023 IEEE Conference on …, 2023 - ieeexplore.ieee.org
The combination of the digital twin and the smart factory has been a popular research
direction in recent years. Automated Material Handling System (AMHS) is an important …

Integrated Scheduling of Jobs, Tools, Machines, and Two Different Set of Transbots

A Ham, MJ Park, J Fowler - IEEE Transactions on …, 2023 - ieeexplore.ieee.org
This paper studies simultaneous scheduling of production and material transfer that arises in
the semiconductor photolithography area. In particular, the right reticle and right job both …

Hyperparameter Tunning in simulation-based optimization for adaptive digital-twin abstraction control of smart manufacturing system

MG Seok, WJ Tan, B Su, W Cai - Proceedings Of The 2022 ACM SIGSIM …, 2022 - dl.acm.org
Smart manufacturing utilizes digital twins (DTs) that are virtual forms of their production
plants for optimizing decisions. Discrete-event models (DEMs) are frequently used to model …