Structuring of Si into multiple scales by metal‐assisted chemical etching
RP Srivastava, DY Khang - Advanced Materials, 2021 - Wiley Online Library
Structuring Si, ranging from nanoscale to macroscale feature dimensions, is essential for
many applications. Metal‐assisted chemical etching (MaCE) has been developed as a …
many applications. Metal‐assisted chemical etching (MaCE) has been developed as a …
Voltage‐and Metal‐assisted Chemical Etching of Micro and Nano Structures in Silicon: A Comprehensive Review
S Surdo, G Barillaro - Small, 2024 - Wiley Online Library
Sculpting silicon at the micro and nano scales has been game‐changing to mold bulk silicon
properties and expand, in turn, applications of silicon beyond electronics, namely, in …
properties and expand, in turn, applications of silicon beyond electronics, namely, in …
Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices
This work reports investigation on the deposition and evaluation of an aluminum-doped zinc
oxide (AZO) thin film and its novel applications to micro-and nano-devices. The AZO thin film …
oxide (AZO) thin film and its novel applications to micro-and nano-devices. The AZO thin film …
Large-area stable superhydrophobic poly (dimethylsiloxane) films fabricated by thermal curing via a chemically etched template
Inspired by nature, large-area stable superhydrophobic poly (dimethylsiloxane)(PDMS) films
have generated extensive interest for various applications such as self-cleaning, corrosion …
have generated extensive interest for various applications such as self-cleaning, corrosion …
Micro-heat sink based on silicon nanowires formed by metal-assisted chemical etching for heat dissipation enhancement to improve performance of micro …
This work demonstrates the micro-heat sink based on silicon nanowires formed by metal-
assisted chemical etching (MACE) for heat dissipation enhancement to improve the …
assisted chemical etching (MACE) for heat dissipation enhancement to improve the …
[HTML][HTML] High aspect ratio arrays of Si nano-pillars using displacement Talbot lithography and gas-MacEtch
Structuring Si in arrays of vertical high aspect ratio pillars, ranging from nanoscale to
macroscale feature dimensions, is essential for producing functional interfaces for many …
macroscale feature dimensions, is essential for producing functional interfaces for many …
Perspectives on black silicon in semiconductor manufacturing: Experimental comparison of plasma etching, MACE, and Fs-laser etching
In semiconductor manufacturing, black silicon (bSi) has traditionally been considered as a
sign of unsuccessful etching. However, after more careful consideration, many of its …
sign of unsuccessful etching. However, after more careful consideration, many of its …
Microfabrication of X-ray optics by metal assisted chemical etching: A review
L Romano, M Stampanoni - Micromachines, 2020 - mdpi.com
High-aspect-ratio silicon micro-and nanostructures are technologically relevant in several
applications, such as microelectronics, microelectromechanical systems, sensors …
applications, such as microelectronics, microelectromechanical systems, sensors …
Liquid and solid states on-chip micro-supercapacitors using silicon nanowire-graphene nanowall-pani electrode based on microfabrication technology
Liquid and solid states on-chip micro-supercapacitors based on polyaniline (PANI) coated
on graphene nanowalls which grown on silicon nanowires were reported in this work. Novel …
on graphene nanowalls which grown on silicon nanowires were reported in this work. Novel …
Thermoelectric power battery using al2o3 nanochannels of 10 nm diameter for energy harvesting of low-grade waste heat
N Van Toan, MMIM Hasnan, D Udagawa… - Energy Conversion and …, 2019 - Elsevier
This work reports the effective of thermal-to-electric energy conversion based on a fluidic
transport of nanochannels electrochemical devices induced by a temperature gradient …
transport of nanochannels electrochemical devices induced by a temperature gradient …