Structuring of Si into multiple scales by metal‐assisted chemical etching

RP Srivastava, DY Khang - Advanced Materials, 2021 - Wiley Online Library
Structuring Si, ranging from nanoscale to macroscale feature dimensions, is essential for
many applications. Metal‐assisted chemical etching (MaCE) has been developed as a …

Voltage‐and Metal‐assisted Chemical Etching of Micro and Nano Structures in Silicon: A Comprehensive Review

S Surdo, G Barillaro - Small, 2024 - Wiley Online Library
Sculpting silicon at the micro and nano scales has been game‐changing to mold bulk silicon
properties and expand, in turn, applications of silicon beyond electronics, namely, in …

Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices

N Van Toan, TTK Tuoi, N Inomata, M Toda, T Ono - Scientific reports, 2021 - nature.com
This work reports investigation on the deposition and evaluation of an aluminum-doped zinc
oxide (AZO) thin film and its novel applications to micro-and nano-devices. The AZO thin film …

Large-area stable superhydrophobic poly (dimethylsiloxane) films fabricated by thermal curing via a chemically etched template

W Xu, P Yi, J Gao, Y Deng, L Peng… - ACS applied materials & …, 2019 - ACS Publications
Inspired by nature, large-area stable superhydrophobic poly (dimethylsiloxane)(PDMS) films
have generated extensive interest for various applications such as self-cleaning, corrosion …

Micro-heat sink based on silicon nanowires formed by metal-assisted chemical etching for heat dissipation enhancement to improve performance of micro …

N Van Toan, K Ito, TTK Tuoi, M Toda, PH Chen… - Energy Conversion and …, 2022 - Elsevier
This work demonstrates the micro-heat sink based on silicon nanowires formed by metal-
assisted chemical etching (MACE) for heat dissipation enhancement to improve the …

[HTML][HTML] High aspect ratio arrays of Si nano-pillars using displacement Talbot lithography and gas-MacEtch

Z Shi, K Jefimovs, M Stampanoni, L Romano - Materials Science in …, 2023 - Elsevier
Structuring Si in arrays of vertical high aspect ratio pillars, ranging from nanoscale to
macroscale feature dimensions, is essential for producing functional interfaces for many …

Perspectives on black silicon in semiconductor manufacturing: Experimental comparison of plasma etching, MACE, and Fs-laser etching

X Liu, B Radfar, K Chen, OE Setälä… - IEEE Transactions …, 2022 - ieeexplore.ieee.org
In semiconductor manufacturing, black silicon (bSi) has traditionally been considered as a
sign of unsuccessful etching. However, after more careful consideration, many of its …

Microfabrication of X-ray optics by metal assisted chemical etching: A review

L Romano, M Stampanoni - Micromachines, 2020 - mdpi.com
High-aspect-ratio silicon micro-and nanostructures are technologically relevant in several
applications, such as microelectronics, microelectromechanical systems, sensors …

Liquid and solid states on-chip micro-supercapacitors using silicon nanowire-graphene nanowall-pani electrode based on microfabrication technology

N Van Toan, TTK Tuoi, J Li, N Inomata, T Ono - Materials Research Bulletin, 2020 - Elsevier
Liquid and solid states on-chip micro-supercapacitors based on polyaniline (PANI) coated
on graphene nanowalls which grown on silicon nanowires were reported in this work. Novel …

Thermoelectric power battery using al2o3 nanochannels of 10 nm diameter for energy harvesting of low-grade waste heat

N Van Toan, MMIM Hasnan, D Udagawa… - Energy Conversion and …, 2019 - Elsevier
This work reports the effective of thermal-to-electric energy conversion based on a fluidic
transport of nanochannels electrochemical devices induced by a temperature gradient …