MEMS technology has revolutionized the industries of twenty-first century by combining the
micromachining technology with the silicon microelectronics. The miniaturized devices …

Microelectromechanical systems, commonly abbreviated as MEMS, have introduced a class
of miniaturized devices and systems with high sensitivity and rapid and accurate delivery of …

Energy harvesting or energy scavenging refers to the process that captures small amounts
of energy from ambient sources, which would otherwise be wasted and converts it into some …

Microelectromechanical systems, commonly abbreviated as MEMS, have introduced a class
of miniaturized devices and systems with high sensitivity and rapid and accurate delivery of …

Microcantilever-based sensors are one of the most versatile sensors in today's field with
potential applications in biological, chemical, and physical sciences (Ma et al., 2019). One of …

Micro-or nano-opto-electromechanical systems (MOEMS/NOEMS) are used for sensing
(Basu et al., 2021b), processing and actuation, in diverse applications. Common sensing …

In 1965 (Nathanson et al., 1965), the first MEMS-based device called a resonant gate
transistor was demonstrated to combine mechanical and electrical parts on a single platform …

Clinical diagnosis is imperative for detecting the early onset of disease, complete health
checks, and effective treatment. Current diagnostics techniques have several drawbacks …

MEMS is currently one of the most explored areas due to the applications of MEMS
technology in consumer, automotive and even biomedical devices. One of the most common …

MEMS-based medical devices have seen exponential research and development in recent
years. A few factors that have enabled the wide adoption of such devices are the progress in …