A review of MEMS oscillators for frequency reference and timing applications

JTM Van Beek, R Puers - Journal of Micromechanics and …, 2011 - iopscience.iop.org
MEMS-based oscillators are an emerging class of highly miniaturized, batch manufacturable
timing devices that can rival the electrical performance of well-established quartz-based …

[HTML][HTML] Effective quality factor tuning mechanisms in micromechanical resonators

JML Miller, A Ansari, DB Heinz, Y Chen… - Applied Physics …, 2018 - pubs.aip.org
Quality factor (Q) is an important property of micro-and nano-electromechanical (MEM/NEM)
resonators that underlie timing references, frequency sources, atomic force microscopes …

Tuning nonlinear damping in graphene nanoresonators by parametric–direct internal resonance

A Keşkekler, O Shoshani, M Lee… - Nature …, 2021 - nature.com
Mechanical sources of nonlinear damping play a central role in modern physics, from solid-
state physics to thermodynamics. The microscopic theory of mechanical dissipation …

Dynamics of 2D material membranes

PG Steeneken, RJ Dolleman, D Davidovikj… - 2D …, 2021 - iopscience.iop.org
The dynamics of suspended two-dimensional (2D) materials has received increasing
attention during the last decade, yielding new techniques to study and interpret the physics …

Reduced order modelling of the non-linear stiffness in MEMS resonators

A Frangi, G Gobat - International Journal of Non-Linear Mechanics, 2019 - Elsevier
We propose a simplified numerical technique to quantify the effects of non-linear stiffness in
MEMS resonators and we validate our approach on a clamped–clamped beam, a softening …

Reduced order modeling of nonlinear microstructures through proper orthogonal decomposition

G Gobat, A Opreni, S Fresca, A Manzoni… - Mechanical Systems and …, 2022 - Elsevier
Abstract We apply the Proper Orthogonal Decomposition (POD) method for the efficient
simulation of several scenarios undergone by Micro-Electro-Mechanical-Systems, involving …

Vibration-induced errors in MEMS tuning fork gyroscopes

SW Yoon, S Lee, K Najafi - Sensors and Actuators A: Physical, 2012 - Elsevier
This paper analyzes potential causes of vibration-induced error in ideal MEMS tuning fork
gyroscopes. Even though MEMS gyros are known to be highly susceptible to mechanical …

A mass multi-warning scheme based on one-to-three internal resonance

C Xia, DF Wang, T Ono, T Itoh, R Maeda - Mechanical Systems and Signal …, 2020 - Elsevier
A new mass multi-warning scheme via integrating duffing nonlinearity with 1: 3 internal
resonance is proposed in this paper, which can achieve the sensing, the first time warning …

Sensitivity enhancement of a resonant mass sensor based on internal resonance

T Zhang, X Wei, Z Jiang, T Cui - Applied Physics Letters, 2018 - pubs.aip.org
There exist numerous vibration modes in a resonant structure, and these modes can interact
with each other. Here, the internal resonance between the fundamental mode and higher …

Micromechanical vibro-impact systems: a review

CP Tsai, WC Li - Journal of Micromechanics and …, 2023 - iopscience.iop.org
Spurred by the invention of the tapping-mode atomic force microscopy three decades ago,
various micromechanical structures and systems that utilize parts with mechanical impact …