A light source for extreme ultraviolet (EUV) radiation is provided. The light source includes a
target droplet generator, a laser generator, a measuring device, and a controller. The target …

(57) ABSTRACT A system includes a laser source operable to provide a laser beam, a laser
amplifier having a gain medium operable to provide energy to the laser beam when the …

Debris is removed from a collector of an extreme ultraviolet light source vessel by applying a
suction force through a vacuum opening of a cable. The method for removing debris also …

A radiation source apparatus includes a vessel, a laser source, a collector, a horizontal
obscuration bar, and a reflective mirror. The vessel has an exit aperture. The laser source is …

A radiation source apparatus includes a vessel, a laser source, a collector, and a reflective
mirror. The vessel has an exit aperture. The laser source is at one end of the vessel and …

A light source for EUV radiation is provided. The light source includes a target droplet
generator, a laser generator, and a controller. The target droplet generator is configured to …

A system includes a laser source operable to provide a laser beam, a laser amplifier having
a gain medium operable to provide energy to the laser beam when the laser beam passes …

A light source for EUV is provided. The light source includes a target droplet generator, a
laser generator, and a controller. The target droplet generator is configured to provide target …