Nanometer-Scale III-V MOSFETs

JA Del Alamo, DA Antoniadis, J Lin… - IEEE Journal of the …, 2016 - ieeexplore.ieee.org
After 50 years of Moore's Law, Si CMOS, the mainstream logic technology, is on a course of
diminishing returns. The use of new semiconductor channel materials with improved …

The 3-D interconnect technology landscape

E Beyne - IEEE Design & Test, 2016 - ieeexplore.ieee.org
This overview article sheds light into the diverse notions and terms associated with 3-D
circuits. It categorizes and classifies the various technologies/techniques and helps the …

Nanowire & nanosheet FETs for ultra-scaled, high-density logic and memory applications

A Veloso, T Huynh-Bao, P Matagne, D Jang… - Solid-State …, 2020 - Elsevier
We report on vertically stacked lateral nanowires (NW)/nanosheets (NS) gate-all-around
(GAA) FET devices as promising candidates to obtain a better power-performance metric for …

Vertical silicon nanowire field effect transistors with nanoscale gate-all-around

Y Guerfi, G Larrieu - Nanoscale research letters, 2016 - Springer
Nanowires are considered building blocks for the ultimate scaling of MOS transistors,
capable of pushing devices until the most extreme boundaries of miniaturization thanks to …

Scaling beyond 7nm node: An overview of gate-all-around fets

W Hu, F Li - 2021 9th international symposium on next …, 2021 - ieeexplore.ieee.org
Gate-all-around (GAA) is a promising MOSFET structure to continue scaling down the size of
CMOS devices beyond 7 nm technology node. This paper gives an overview of different …

Characteristics of stacked gate-all-around Si nanosheet MOSFETs with metal sidewall source/drain and their impacts on CMOS circuit properties

WL Sung, Y Li - IEEE Transactions on Electron Devices, 2021 - ieeexplore.ieee.org
In this brief, we computationally examine electrical characteristics of stacked gate-all-around
Si nanosheet MOSFETs (GAA NS-FETs) with and without metal sidewall (MSW) …

Perspective: Optical measurement of feature dimensions and shapes by scatterometry

AC Diebold, A Antonelli, N Keller - Apl Materials, 2018 - pubs.aip.org
The process of patterning the next generation of structures that become transistors,
capacitors, or interconnects continues to challenge the semiconductor industry. A critical …

Nanoscale thermal transport in vertical gate-all-around junctionless nanowire transistors—Part I: Experimental methods

C Mukherjee, H Rezgui, Y Wang… - … on Electron Devices, 2023 - ieeexplore.ieee.org
In this article, we present the first detailed experimental study of electrothermal effects in 3-D
vertical gate-all-around (GAA) junctionless nanowire transistors (JLNTs). In contrast with …

Selective wet etching of silicon germanium in composite vertical nanowires

Z Baraissov, A Pacco, S Koneti, G Bisht… - … applied materials & …, 2019 - ACS Publications
Silicon germanium (Si x Ge1–x or SiGe) is an important semiconductor material for the
fabrication of nanowire-based gate-all-around transistors in the next-generation logic and …

Single-event latch-up: Increased sensitivity from planar to FinFET

J Karp, MJ Hart, P Maillard, G Hellings… - IEEE Transactions on …, 2017 - ieeexplore.ieee.org
Increased sensitivity of FinFET technology to single-event latch-up (SEL) was found during
64-MeV proton beam accelerated testing and confirmed with neutron beam experiments …