This paper discusses piezoelectric acoustic devices based on widely used piezoelectric
materials. Commonly used piezoelectric thin film deposition techniques and the influence of …

This paper presents a comprehensive literature survey of MEMS based piezoelectric
microphones along with the fabrication processes involved, application domains, and …

This paper presents a review of state-of-the-art micro-electro-mechanical-systems (MEMS)
acoustic emission (AE) sensors. MEMS AE sensors are designed to detect active defects in …

Microelectromechanical systems (MEMS)-based piezoresistive and capacitive microphones
have gained significant attention due to their miniaturization, high performance, and diverse …

This paper reports a piezoelectric zinc oxide (ZnO) based acoustic sensor for high sound
pressure level (SPL) with wide bandwidth for audio and aeroacoustic applications. The …

This work describes the development of an acoustic sensor based on piezoelectric ZnO thin
film to be utilized for aero-acoustic measurements. The design of the device was carried out …

This paper reports the development of an acoustic sensor structure with a square-shaped
diaphragm with side length 1750 μm. The fabricated structure has been annealed at …

In this paper, an electronic stethoscope is designed based on a bionic Micro-Electro-
Mechanical System (MEMS) sound-sensitive sensor. Inspired by the strong sound reflection …

This paper reports finite element model (FEM) simulation and fabrication of a square shaped
diaphragm along with microtunnel for MEMS acoustic sensor which can be used for …

This paper reports a new technique for fabrication of diaphragm and microchannel in a
single step for the development of a piezoelectric MEMS acoustic sensor. It describes the …