Piezoelectric MEMS based acoustic sensors: A review
This paper discusses piezoelectric acoustic devices based on widely used piezoelectric
materials. Commonly used piezoelectric thin film deposition techniques and the influence of …
materials. Commonly used piezoelectric thin film deposition techniques and the influence of …
[HTML][HTML] Recent development and futuristic applications of MEMS based piezoelectric microphones
This paper presents a comprehensive literature survey of MEMS based piezoelectric
microphones along with the fabrication processes involved, application domains, and …
microphones along with the fabrication processes involved, application domains, and …
MEMS acoustic emission sensors
D Ozevin - Applied Sciences, 2020 - mdpi.com
This paper presents a review of state-of-the-art micro-electro-mechanical-systems (MEMS)
acoustic emission (AE) sensors. MEMS AE sensors are designed to detect active defects in …
acoustic emission (AE) sensors. MEMS AE sensors are designed to detect active defects in …
MEMS-based piezoresistive and capacitive microphones: A review on materials and methods
Microelectromechanical systems (MEMS)-based piezoresistive and capacitive microphones
have gained significant attention due to their miniaturization, high performance, and diverse …
have gained significant attention due to their miniaturization, high performance, and diverse …
Design, fabrication and reliability study of piezoelectric ZnO based structure for development of MEMS acoustic sensor
This paper reports a piezoelectric zinc oxide (ZnO) based acoustic sensor for high sound
pressure level (SPL) with wide bandwidth for audio and aeroacoustic applications. The …
pressure level (SPL) with wide bandwidth for audio and aeroacoustic applications. The …
Piezoelectric based MEMS acoustic sensor for wide frequency applications
This work describes the development of an acoustic sensor based on piezoelectric ZnO thin
film to be utilized for aero-acoustic measurements. The design of the device was carried out …
film to be utilized for aero-acoustic measurements. The design of the device was carried out …
Fabrication and annealing temperature optimization for a piezoelectric ZnO based MEMS acoustic sensor
This paper reports the development of an acoustic sensor structure with a square-shaped
diaphragm with side length 1750 μm. The fabricated structure has been annealed at …
diaphragm with side length 1750 μm. The fabricated structure has been annealed at …
A bionic MEMS electronic stethoscope with double-sided diaphragm packaging
S Duan, W Wang, S Zhang, X Yang, Y Zhang… - IEEE …, 2021 - ieeexplore.ieee.org
In this paper, an electronic stethoscope is designed based on a bionic Micro-Electro-
Mechanical System (MEMS) sound-sensitive sensor. Inspired by the strong sound reflection …
Mechanical System (MEMS) sound-sensitive sensor. Inspired by the strong sound reflection …
[HTML][HTML] Optimization and fabrication of MEMS based piezoelectric acoustic sensor for wide frequency range and high SPL acoustic application
This paper reports finite element model (FEM) simulation and fabrication of a square shaped
diaphragm along with microtunnel for MEMS acoustic sensor which can be used for …
diaphragm along with microtunnel for MEMS acoustic sensor which can be used for …
Fabrication of microchannel and diaphragm for a MEMS acoustic sensor using wet etching technique
WR Ali, M Prasad - Microelectronic Engineering, 2022 - Elsevier
This paper reports a new technique for fabrication of diaphragm and microchannel in a
single step for the development of a piezoelectric MEMS acoustic sensor. It describes the …
single step for the development of a piezoelectric MEMS acoustic sensor. It describes the …